AMAT Applied Materials 0190-77587主框架接口模块

1.产 品 资 料 介 绍：

产品概述

AMAT 0190-77587 主框架接口模块是 Applied Materials 半导体设备中的关键通信和接口模块，用于连接设备主框架与各子系统或控制模块。该模块负责信号的汇总、传递与分配，实现主控制器与加热器、流量控制器、真空系统、数字控制器等子模块的协同工作，是保证设备整体稳定运行和工艺精确控制的重要组件。

技术参数（典型特征）

• 类型：主框架接口模块 / Mainframe Interface Module

• 功能：信号汇总、信号分配、数据通信

• 接口类型：多通道数字和模拟信号接口，兼容设备总线通信

• 工作环境：洁净室兼容，耐高温、抗振动

• 兼容设备：Applied Materials 各类沉积（CVD/PVD）、刻蚀（Etch）、离子注入、热处理设备

• 电气特性：支持主控制器与各子系统模块的安全、可靠通信

应用场景

1. 子系统通信桥接

   • 将主控制器与各功能模块（加热器、流量控制器、真空系统、分析模块等）连接，实现信息传递。

2. 信号分配与整合

   • 汇总各子系统信号，确保主控制器能够准确掌握设备状态。

3. 设备协调运行

   • 支持各模块同步操作，保证工艺流程稳定运行。

4. 维护与升级便捷

   • 模块化接口设计，便于替换和升级子系统模块，减少停机时间。

产品优势

• 高可靠性：确保主控制器与子系统模块间通信稳定可靠。

• 模块化设计：便于安装、拆卸和维护，提高设备可用性。

• 兼容性广：适配多种 AMAT 半导体设备及控制系统。

• 支持实时监控：及时传递各子系统信号，保证工艺稳定性。

• 提升工艺一致性：通过协调子系统，实现工艺参数精确控制，减少波动。

AMAT Applied Materials 0100-90025操作控制面板 英文资料：

Product Overview

The AMAT 0190-77587 main framework interface module is a critical communication and interface module in Applied Materials semiconductor equipment, used to connect the equipment main framework with various subsystems or control modules. This module is responsible for summarizing, transmitting, and distributing signals, achieving collaborative work between the main controller and sub modules such as heaters, flow controllers, vacuum systems, and digital controllers. It is an important component to ensure the overall stable operation of the equipment and precise process control.

Technical parameters (typical features)

Type: Mainframe Interface Module

Function: Signal aggregation, signal distribution, data communication

Interface type: Multi channel digital and analog signal interface, compatible with device bus communication

Work environment: cleanroom compatible, high temperature resistant, vibration resistant

Compatible devices: Applied Materials various deposition (CVD/PVD), etching (Etch), ion implantation, heat treatment equipment

Electrical characteristics: Supports safe and reliable communication between the main controller and various subsystem modules

Application scenarios

Subsystem Communication Bridge

Connect the main controller to various functional modules (heater, flow controller, vacuum system, analysis module, etc.) to achieve information transmission.

Signal allocation and integration

Summarize the signals of each subsystem to ensure that the main controller can accurately grasp the equipment status.

Coordinated operation of equipment

Support synchronous operation of various modules to ensure stable operation of the process flow.

Easy maintenance and upgrade

Modular interface design facilitates the replacement and upgrade of subsystem modules, reducing downtime.

Product advantages

High reliability: Ensure stable and reliable communication between the main controller and subsystem modules.

Modular design: easy to install, disassemble, and maintain, improving equipment availability.

Wide compatibility: compatible with various AMAT semiconductor devices and control systems.

Support real-time monitoring: timely transmission of signals from various subsystems to ensure process stability.

Improving process consistency: By coordinating subsystems, precise control of process parameters can be achieved, reducing fluctuations.

AMAT Applied Materials  0100-90025操作控制面板 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218