AMAT Applied Materials 0100-90468充电电压 PCB 卡

1.产 品 资 料 介 绍：

核心规格

功能特点

• 高精度控制：确保离子能量一致性，提高晶圆工艺均匀性与重复性。
• 宽范围可调：满足不同工艺所需注入能量。
• 快速响应：实时监测与调整，适应动态负载变化。
• 多重保护：过压、欠压、过流及过热保护，符合 SEMI S2 安全规范。
• 状态监控：板载 LED 及通信接口，便于故障诊断与远程监控。

典型应用

• 高电流离子注入能量控制
• 离子源加速电压稳定化
• 电子枪偏压调节

更换与维护建议

1. 更换
   • 断电并释放高压残留电荷。
   • 按原引脚定义插入新卡，确保接地良好。
2. 调试
   • 先进行低压自检，再逐步升压至目标值。
   • 利用设备诊断工具校准电压反馈。
3. 维护
   • 每 6–12 个月检查接口紧固与屏蔽完整性。
   • 清洁散热片，防止灰尘积聚影响性能。

AMAT Applied Materials 0100-90468充电电压 PCB 卡 英文资料：

AMAT 0100-90468 is a dedicated charging voltage PCB card for semiconductor devices such as XR80, used for precise adjustment and monitoring of ion sources or acceleration voltages to ensure stable injection energy. It is commonly available in Rev. F.

Core specifications

Project specification remarks

Application models XR80 and Quantum X plasma injection machines are compatible with high current injection systems

Functional charging voltage regulation and feedback control closed-loop PID stable output

Output voltage range 0-50 kV (adjustable) Typical resolution 0.1%

Voltage accuracy ± 0.05% FS better than industry standards

Sampling frequency 10 kHz, fast response to load changes

Interface analog/digital mixed interface compatible device control system

Working voltage 24 VDC ± 10% monorail power supply

Protection level IP20 dustproof and splash proof

Size approximately 300 × 200 × 40 mm standard chassis slot

Material: 316L stainless steel shielding+FR-4 substrate for anti-interference and corrosion resistance

Features

High precision control: Ensure ion energy consistency, improve wafer process uniformity and repeatability.

Wide range adjustable: to meet the energy injection requirements of different processes.

Quick response: Real time monitoring and adjustment to adapt to dynamic load changes.

Multiple protection: overvoltage, undervoltage, overcurrent, and overheating protection, in compliance with SEMI S2 safety specifications.

Status monitoring: Onboard LED and communication interface for easy fault diagnosis and remote monitoring.

Typical Applications

Energy control of high current ion implantation

Ion source accelerates voltage stabilization

Electron gun bias adjustment

Replacement and maintenance suggestions

ｒｅｐｌａｃｅ

Power off and release high-voltage residual charges.

ｉｎｓｅｒｔ the new card according to the original pin definition, ensuring good grounding.

debug

Perform a low voltage self-test first, and then gradually increase the voltage to the target value.

Use equipment diagnostic tools to calibrate voltage feedback.

maintenance

Check the interface fastening and shielding integrity every 6-12 months.

Clean the heat sink to prevent dust accumulation from affecting performance.

AMAT Applied Materials  0100-90468充电电压 PCB 卡 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218