AMAT Applied Materials 0190-76273驱动器
1.产 品 资 料 介 绍：
AMAT Applied Materials 0190-76273 驱动器
一、核心规格与技术参数
二、典型应用场景
AMAT Applied Materials 0190-76273驱动器 英文资料：
AMAT Applied Materials 0190-76273 Driver
AMAT 0190-76273 is a servo driver designed specifically for precision motion control of semiconductor equipment. Its core is used to drive key moving components such as wafer transfer robotic arms, alignment platforms, and process chamber gate valves. It supports high-precision position, speed, and torque closed-loop control and is compatible with main flow wafer process platforms such as Centura and Endura, ensuring the stability and repeatability of equipment motion.
1、 Core specifications and technical parameters
Detailed description of project specifications/indicators
Drive type: DC servo drive (analog+digital dual-mode) compatible with permanent magnet synchronous motor (PMSM) and brushless DC motor (BLDC), meeting the motion requirements of different loads
The rated output power is 1.5 kW, and the peak power is 3 kW, which can cope with instantaneous high load scenarios such as robotic arm start stop and platform positioning, avoiding motion deviation caused by insufficient power
The three control modes of position control, speed control, and torque control can be switched through a dip switch or instructions from the upper computer:
-Position control: Supports pulse/direction signal input, with a repeat positioning accuracy of ± 0.001 mm (in conjunction with high-precision encoders);
-Speed control: Response time ≤ 50 μ s, supports stable operation in a wide speed range of 0-3000 rpm;
-Torque control: Torque output accuracy ± 2% FS, suitable for scenarios requiring constant torque such as precision clamping
The feedback interface supports incremental encoders (up to 2500 PPR) and absolute value encoders (SSI protocol). The encoder signal adopts differential input, which has strong anti electromagnetic interference ability and ensures the accuracy of feedback data
The protection function automatically cuts off the output and outputs a fault signal when overcurrent, overvoltage, undervoltage, overheating, motor stalling, or encoder fault protection is triggered abnormally. At the same time, it locks the fault code for quick troubleshooting
Supply voltage DC 24-75 V (typical 48 V) compatible with commonly used industrial DC power supply systems for semiconductor equipment, supporting redundant power supply (optional) to enhance reliability
The working environment temperature is 0-55 ℃, humidity is ≤ 85% RH (non condensing), suitable for industrial environments with enclosed equipment control cabinets and multiple electromagnetic interferences, without the need for additional heat dissipation devices (natural air cooling is sufficient)
The communication interface RS485 (Modbus RTU protocol) can be connected to the device main controller to achieve remote operation of driver parameter configuration, status monitoring, and fault diagnosis
2、 Typical application scenarios
Wafer transfer robotic arm drive: used for the wafer transfer arm of the Centura/Endura platform, controlling the extension, rotation, and lifting of the arm body to ensure the positional accuracy of the wafer during transfer between process chambers, avoiding collisions or wafer offset.
Wafer alignment platform control: Drive the X/Y/Z axis movement of the alignment platform, and cooperate with the optical positioning system to achieve micrometer level alignment of the wafer, meeting the positioning requirements of high-precision processes such as photolithography and etching.
AMAT Applied Materials 0190-76273驱动器 产品展示
产品视频
3.其他产品
AMAT 0190-15384 控制器模块
Kollmorgen AKD-N00307-DSEC-E000伺服驱动器
ABB UNC4673A HIEE205014R001 测量接口单元模块
4.其他英文产品
HONEYWELL CC-PAIX01 Sequence control module
HONEYWELL CC-PAOX01 Control module
PCH1026 Channel touch point card
| 710-658172-20 | 8005-EPS-50 | 8030-CRM-720 |
| 710-658161-20 | 8005-EBU-1 | 8030-CRM-601 |
| 710-658086-20 | 8005-DN-216 | F31X133PRUAJG1 |
| 710-658081-20 | 8005-DN-208 | 710-611538-000 |
| 710-658046-20 | 8005-DN-116 | 820-21036-001 |
| 710-657600-20 | 8005-DN-108 | 710-661729-00 |
| 710-657231-20 | 8005-DMU-1 | 820-22196-002 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
