AMAT Applied Materials 0100-94036交流电源模块
1.产 品 资 料 介 绍：
AMAT Applied Materials 0100-94036 交流电源模块
一、核心规格与技术参数
二、典型应用场景
AMAT Applied Materials 0100-94036交流电源模块 英文资料：
AMAT Applied Materials 0100-94036 AC Power Module
AMAT 0100-94036 is an industrial grade AC power module designed specifically for semiconductor equipment. Its core function is to convert external three-phase or single-phase AC power into stable AC output required by the equipment, providing power to high-power loads such as process chamber heating units, fans, and pump sets. It is compatible with mainstream wafer process platforms such as Centura and Endura, ensuring the reliability and stability of equipment power supply.
1、 Core specifications and technical parameters
Detailed description of project specifications/indicators
Input type: three-phase AC 380V/400V/480V (optional) compatible with global industrial standard AC power supply, input voltage allows ± 10% fluctuation, adapts to changes in grid voltage
Rated output voltage: AC 220V/380V (customizable); Rated power: 5kVA-10kVA output voltage accuracy ± 1%, load adjustment rate ≤ 2%, ensuring stable voltage for heating units, motors and other loads
High frequency PWM pulse width modulation with a response speed of ≤ 200 μ s can quickly suppress voltage fluctuations caused by power grid fluctuations or load changes
The protection function immediately cuts off the output and locks the fault status when overvoltage, undervoltage, overcurrent, overload, short circuit, or overheating protection is abnormal. At the same time, it outputs a fault signal to the main controller to avoid load damage
The cooling method is forced air cooling (with temperature controlled fan), and the fan automatically starts and stops according to the module temperature. It runs at low speed at low temperatures to reduce noise and energy consumption; Full speed heat dissipation at high temperatures to ensure that the module's operating temperature is ≤ 65 ℃
The monitoring interface RS485 (Modbus RTU protocol) can upload input/output voltage, current, power, temperature, and fault status in real time, supporting remote parameter configuration and fault reset
Working environment temperature 0-55 ℃, humidity ≤ 90% RH (non condensing), suitable for industrial environments with multiple loads and high heat dissipation in equipment control cabinets, protection level IP20
Size and installation standards: 19 inch rack mounted (4U height) for easy integration into equipment power distribution systems, supports front and rear fixation, and has strong installation stability
2、 Typical application scenarios
Semiconductor process chamber heating power supply: provides stable AC 220V power supply for the chamber heating tubes of etching machines and PECVD equipment, ensuring precise temperature control and avoiding voltage fluctuations that affect process stability.
Equipment power load drive: Provides AC 380V power to three-phase loads such as fans, vacuum pumps, and conveyor motors in the wafer transfer system, reducing voltage surges during motor start stop and extending equipment life through voltage stabilization function.
Auxiliary system power supply: supplies power to auxiliary equipment such as water pumps and air compressors in the equipment cooling system, and monitors power supply parameters through RS485 interface to timely detect overload, overcurrent and other abnormalities, avoiding main equipment shutdown caused by auxiliary system failures.
AMAT Applied Materials 0100-94036交流电源模块 产品展示
产品视频
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| 710-650879-20 | 8055-SCP-654 | 4007-001-0089 |
| 710-650204-20 | 8055-SCP-453 | 710-650074-20 |
| 710-650201-20 | 8055-SCP-654R | F31X170TBSADG1 |
| 710-650094-20 | 8030-CRM-230 | 740-607108-005 |
| 710-650044-20 | 8030-CRM-222 | 710-611867-000 |
| 710-615775-000 | 8030-CRM-220 | F31X170TBSACG1 |
| 710-613084 | 8030-CRM-214 | 073-655007-00 |
| 710-611725-002 | 8030-CRM-211R | 531X309SPCAHG1 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
