AMAT Applied Materials 3020-01085气缸空气模块

1.产 品 资 料 介 绍：

核心规格

模块结构与原理

1. 气缸：双作用设计，输出力约 190 N（6 bar），满足晶圆夹具开合与机械臂定位需求。
2. 空气处理：压缩空气经 5μm 过滤器去除颗粒与油雾，再由油雾器按需润滑，确保阀件与密封件寿命。
3. 控制组件：内置二位五通电磁阀，配合可调节流阀与缓冲装置，实现气缸速度与启停精准控制。
4. 消音器：排气端安装消音器，降低噪声并防止灰尘倒吸。

AMAT Applied Materials 3020-01085气缸空气模块 英文资料：

AMAT 3020-01085 is a double acting cylinder air module with a cylinder diameter of 2.5 "(63.5mm) and a stroke of 2.0" (50.8mm). It integrates solenoid valves, filters, speed control valves, and mufflers for precision pneumatic actions such as wafer transfer and fixture positioning, and is compatible with semiconductor devices such as Centura and Endura.

Core specifications

Project parameter description

Functional positioning: Dual acting cylinder+air treatment+integrated control, reducing external pipelines, improving cleanliness and stability

Cylinder type double acting, standard type both front and rear ends can intake air, stable output force

Cylinder diameter/stroke 2.5 "/2.0" (63.5/50.8mm) compatible with wafer transfer robotic arm standard stroke

Working pressure 4-8 bar, typical 6 bar operation

Interface type: Gas port: G1/4 "; Electrical: M12 × 1 5-pin compatible with AMAT standard trachea and control line

Air treatment built-in filter+oil mist filter with a filtration accuracy of 5 μ m, oil injection can be turned off as needed

Adjustable speed control function with buffering and throttle valve to adjust piston speed and buffering, reducing impact

Material and protective cylinder body: aluminum alloy; Piston: hard chrome plated; Surface: Anodized and corrosion-resistant, suitable for high cleanliness workshops

Size and installation total length 200mm, 4-M6 mounting hole compatible with AMAT standard mounting position

Environment temperature: 5-50 ℃. Avoid high temperature and condensation environment

Module Structure and Principle

The module consists of a cylinder body, an air handling unit, and control components:

Cylinder: Double acting design, with an output force of approximately 190 N (6 bar), meeting the requirements of wafer fixture opening and closing and mechanical arm positioning.

Air treatment: Compressed air is filtered through a 5 μ m filter to remove particles and oil mist, and then lubricated as needed by an oil mist generator to ensure the service life of valves and seals.

Control component: Built in two position five way solenoid valve, combined with adjustable flow valve and buffer device, to achieve precise control of cylinder speed and start stop.

Muffler: Install a muffler at the exhaust end to reduce noise and prevent dust from being sucked back.

 AMAT Applied Materials 3020-01085气缸空气模块 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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