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AMAT Applied Materials 0100-02292背板

发布时间:2025-09-29人气:
  • AMAT Applied Materials 0100-02292背板
  • AMAT Applied Materials 0100-02292背板

AMAT Applied Materials 0100-02292背板

1.产 品 资 料 介 绍:

一、产品定位与核心价值
AMAT 0100-02292 背板是应用材料(Applied Materials)半导体设备中的关键互联部件,主要承担设备内部各类功能模块(如控制模块、驱动模块、检测模块)之间的信号传输与电力分配任务。在半导体设备复杂的电气系统中,它如同 “神经网络主干”,不仅要保障多模块间数据传输的高速性与稳定性,还要实现电力的精准分配,为设备各组件协同运行提供可靠的硬件支撑,是确保半导体设备高精度、高效率工作的重要基础部件。
二、核心技术特性与工艺规范
技术维度
具体参数与实现细节
部件属性
半导体设备专用高密度互联背板,适配 AMAT 设备模块化电气系统的集成需求
安装定位
设备电气控制柜内部核心区域,采用导轨式或螺钉固定式安装,与各功能模块接口对齐精度≤0.1mm,周边预留≥20mm 散热空间
核心功能
多模块信号互联(支持数字信号、模拟信号传输)、集中式电力分配(为不同模块提供适配电压)、模块连接状态监测
材质体系
基板采用 FR-4 玻璃纤维环氧树脂(介电常数 4.0-4.5,介损角正切≤0.02),导电层为电解铜(厚度 35μm-70μm),表面采用沉金工艺处理(金层厚度≥1μm)
电气性能
信号传输速率最高可达 10Gbps,信号衰减≤0.5dB/m(在 1GHz 频率下);电力分配支持 5V、12V、24V 多电压输出,最大总供电电流 50A,各供电通道纹波≤50mV
连接接口
配备 20 个以上标准连接器(兼容 AMAT 专用接口协议),接触电阻≤20mΩ,插拔寿命≥1000 次,具备防误插设计(采用独特键位布局)
防护性能
绝缘电阻≥10¹²Ω,耐电压≥1000V AC(1 分钟无击穿),工作温度范围 -20℃至 70℃,湿度适应范围 10%-90%(无凝露)
三、场景适配与性能优势
1. 半导体核心场景适配
  • 高精度工艺设备场景:在光刻设备、薄膜沉积设备中,该背板可实现控制模块与精密电机驱动模块之间的高速信号传输,将信号延迟控制在 10ns 以内,保障电机运动的定位精度(偏差≤0.001mm),满足晶圆加工的微米级甚至纳米级工艺要求。
  • 设备高负荷运行场景:在半导体生产线 24 小时连续运行的环境下,背板采用多通道并行供电设计,可根据各模块负载动态调整电力分配,避免因单一模块过载导致的供电故障,同时其优异的散热性能(通过基板导热与空气自然对流结合)可使工作温度稳定在 40℃以下,确保长期高负荷运行的可靠性。
  • 洁净室严苛环境场景:背板表面采用无铅沉金工艺,无污染物析出,可耐受洁净室中 99% 异丙醇(IPA)的定期清洁,符合 ISO 5 级洁净室的颗粒控制标准(每立方英尺>0.5μm 颗粒<100 个),避免因部件污染影响晶圆生产质量。

AMAT Applied Materials 0100-02292背板 英文资料:

1、 Product positioning and core values

The AMAT 0100-02292 backplane is a key interconnect component in Applied Materials semiconductor equipment, mainly responsible for signal transmission and power distribution tasks between various functional modules (such as control modules, drive modules, and detection modules) inside the equipment. In the complex electrical system of semiconductor equipment, it is like a "neural network backbone", which not only needs to ensure the high-speed and stable data transmission between multiple modules, but also to achieve precise power distribution, providing reliable hardware support for the coordinated operation of various components of the equipment. It is an important basic component to ensure the high-precision and high-efficiency operation of semiconductor equipment.

2、 Core technical characteristics and process specifications

Technical dimension

Specific parameters and implementation details

Component Attributes

High density interconnect backplane for semiconductor equipment, adapted to the integration requirements of modular electrical systems in AMAT devices

Installation and positioning

The core area inside the electrical control cabinet of the equipment is installed using guide rail or screw fixation, with an alignment accuracy of ≤ 0.1mm with each functional module interface, and a reserved heat dissipation space of ≥ 20mm around the perimeter

Core functions

Multi module signal interconnection (supporting digital and analog signal transmission), centralized power distribution (providing adaptive voltage for different modules), module connection status monitoring

Material system

The substrate is made of FR-4 glass fiber epoxy resin (dielectric constant 4.0-4.5, dielectric loss tangent ≤ 0.02), the conductive layer is electrolytic copper (thickness 35 μ m-70 μ m), and the surface is treated with gold deposition process (gold layer thickness ≥ 1 μ m)

Electrical performance

The maximum signal transmission rate can reach 10Gbps, and the signal attenuation is ≤ 0.5dB/m (at 1GHz frequency); Power distribution supports multiple voltage outputs of 5V, 12V, and 24V, with a maximum total supply current of 50A and ripple ≤ 50mV in each supply channel

Connection interface

Equipped with more than 20 standard connectors (compatible with AMAT dedicated interface protocol), contact resistance ≤ 20m Ω, plug and unplug life ≥ 1000 times, with anti misoperation design (using unique key layout)

Protective performance

Insulation resistance ≥ 10 ¹² Ω, withstand voltage ≥ 1000V AC (no breakdown for 1 minute), operating temperature range -20 ℃ to 70 ℃, humidity adaptation range 10% -90% (no condensation)

3、 Scene adaptation and performance advantages

1. Adaptation to Semiconductor Core Scenarios

High precision process equipment scenario: In lithography equipment and thin film deposition equipment, this backplane can achieve high-speed signal transmission between the control module and the precision motor drive module, controlling the signal delay within 10ns, ensuring the positioning accuracy of the motor movement (deviation ≤ 0.001mm), and meeting the micro - or even nano level process requirements of wafer processing.

 AMAT Applied Materials  0100-02292背板 产品展示      

amat_applied_materials_back_plate_300mm_linear_platform_0100-02292_rev_002.jpg

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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