AMAT Applied Materials 0100-91086等离子弧电流电路板

1.产 品 资 料 介 绍：

AMAT Applied Materials 0100-91086等离子弧电流电路板 英文资料：

AMAT Applied Materials 0100-91086 Plasma Arc Current Circuit Board Product Overview

AMAT Applied Materials 0100-91086 plasma arc current circuit board is the core control component of the focused plasma process module in semiconductor manufacturing equipment. It is designed specifically for high-precision equipment such as etching machines, PVD (Physical Vapor Deposition)/CVD (Chemical Vapor Deposition), with the core characteristics of "precise current control, process stability assurance, and system collaborative adaptation". As the "current center" of plasma technology, it directly determines the density and energy stability of plasma through real-time acquisition and dynamic adjustment of plasma arc current, thereby ensuring the consistency of key process parameters such as wafer etching depth and deposition film thickness. It is a key hardware support for achieving high-precision processing and improving product yield in semiconductor manufacturing.

From a functional logic perspective, the circuit board is built around a complete control chain of "monitoring regulation collaboration": the core monitoring layer integrates a high-precision current acquisition circuit, which can capture small fluctuations in plasma arc current in real time (with a detection accuracy of milliampere level), ensuring instantaneous response to current changes during the process; The dynamic adjustment layer uses a built-in precision control chip and feedback algorithm to quickly adjust the output parameters based on the collected current signal, controlling the current fluctuation within a very small range (usually ≤± 1%), avoiding problems such as etching pattern distortion and uneven film composition caused by unstable current; The system collaboration layer seamlessly interfaces with other control boards (such as the process control board and safety protection board) and control servers of the AMAT system through modular connectors, receiving process parameter instructions (such as target current values) issued by the upper computer, while uploading real-time current data and abnormal status information, integrating into the overall automation control system of the equipment, and achieving closed-loop management of "process requirements current regulation status feedback".

In terms of adaptability and reliability design, the 0100-91086 circuit board is deeply compatible with the harsh scenarios of semiconductor manufacturing: it adopts strong anti-interference design in electrical characteristics, and uses power filtering, signal shielding and other technologies to resist the electromagnetic interference of internal high-frequency signals (such as RF power supply) and external industrial environment, ensuring the accuracy of current acquisition and regulation and avoiding process deviations caused by interference; The mechanical structure adopts standard PCB module size, which can be directly inserted into the dedicated backplane or control rack of AMAT equipment, and can be integrated without additional modification, adapting to the compact and modular design requirements of semiconductor equipment; At the same time, it has the characteristics of low power consumption and high reliability. By using industrial grade temperature resistant components, it can maintain stable performance during long-term continuous operation of the equipment (semiconductor factories usually produce continuously 24 hours a day), reduce equipment downtime caused by hardware failures, and provide solid guarantees for efficient and stable production in semiconductor manufacturing.

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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