AMAT Applied Materials  0190-09419驱动器

1.产 品 资 料 介 绍：

AMAT Applied Materials  0190-09419驱动器 英文资料：

1、 Core positioning and system of the product

The 0190-09419 driver is a key power drive component in the motion control system of semiconductor equipment at Applied Materials Corporation (AMAT), belonging to the "high-precision servo drive" product line. In core processes such as wafer transfer, coating and development, and film deposition that rely on micrometer level motion control, the speed stability and position accuracy of the motor directly determine the success or failure of the process. As the "power conversion center", this driver is specifically adapted to the servo motor system of AMAT Lithium Pro coating and development equipment and Endura PVD deposition equipment. By converting the digital instructions of the equipment's main controller into precise driving signals, it achieves closed-loop control of motor speed, torque, and position, and is the core execution unit that ensures high-precision movement of equipment moving parts (such as coating heads and wafer robotic arms).

2、 Analysis of core functions and technical characteristics

Considering the stringent requirements for precision, response speed, and reliability in semiconductor device motion control (such as wafer transfer position error requiring ≤± 1 μ m), the core characteristics of this driver can be accurately disassembled into the following points:

Multi type motor adaptation drive: supports dual-mode drive mode of AC servo motor and stepper motor, adapts to motor models with power range of 50W-500W, compatible with incremental encoder (1024-10000 lines) and absolute encoder signal input, can achieve stepless adjustment of speed from 0-3000rpm, with speed control accuracy of ± 0.1rpm, meeting the power requirements of different motion scenarios such as coating head movement and wafer suction cup rotation.

High precision motion closed-loop control: Built in 32-bit DSP digital signal processor and PID+feedforward control algorithm, combined with position feedback signal to achieve triple closed-loop control - position control error ≤ ± 1 pulse equivalent (corresponding to linear displacement ≤ 0.1 μ m), speed response time ≤ 10ms, torque control accuracy up to ± 1% of rated torque. For high-speed start stop scenarios, it has an automatic acceleration and deceleration planning function (acceleration and deceleration time adjustable from 0.1-10s) to avoid wafer offset or component wear caused by motion impact.

Intelligent signal processing and isolation: equipped with 8 digital input/output channels and 4 analog input channels, capable of collecting motor temperature, vibration, and external limit signals, with a signal sampling frequency of ≥ 10kHz; Adopting optoelectronic isolation technology to achieve electrical isolation between control circuit and power circuit (isolation voltage ≥ 2500V DC), combined with low-pass filter and pulse shaper to suppress electromagnetic noise, ensuring signal transmission delay ≤ 1 μ s, suitable for stable operation in strong electromagnetic environment of semiconductor equipment.

 AMAT Applied Materials 0190-09419驱动器 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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