AMAT Applied Materials 0190-01270模拟 I/O PCB 卡
1.产 品 资 料 介 绍:
- 工艺参数采集:接入温度 / 压力传感器,实时采集刻蚀腔 / 沉积腔的工艺数据。
- 执行机构控制:输出模拟信号,驱动气动阀、流量控制器调节气体流量 / 真空度。
- 信号适配中转:将传感器微弱信号放大为标准信号,传输至控制器优化工艺参数。
- 安装:固定于设备电控板卡插槽,屏蔽线双端接地(≤0.5Ω),远离射频模块。
- 维护:每 3 个月清洁金手指,每 6 个月校准输入 / 输出精度,故障优先排查通道接线虚接。
- 采购:优先选原厂供应商(如九展自动化),到货验证信号精度报告与序列号溯源。
AMAT Applied Materials 0190-01270模拟 I/O PCB 卡 英文资料:
1、 Core positioning
AMAT 0190-01270 is the "analog signal relay core" of semiconductor equipment, responsible for analog signal acquisition and control command output of process parameters (such as temperature and pressure), achieving precise signal conversion between sensors and controllers, and adapting to Class 100 clean environments and high-frequency electromagnetic interference scenarios.
2、 Key parameters
Category
Specifications
I/O channel
8 analog inputs (0-10V/4-20mA), 4 analog outputs
Accuracy level
Input ± 0.1% FS, output ± 0.2% FS
Response speed
≤1ms
Isolation characteristics
Isolation voltage between channels ≥ 2500V DC
Environmental adaptation
-10-60 ℃ IP40、 Anti EMI interference
Compatibility
Compatible with AMAT 0225-01622 controller and 0100-20001 interface module
3、 Core applications
Process parameter collection: Connect temperature/pressure sensors to real-time collect process data from etching/deposition chambers.
Execution mechanism control: Output analog signals to drive pneumatic valves and flow controllers to regulate gas flow/vacuum degree.
Signal adaptation relay: amplifies the weak signal of the sensor into a standard signal and transmits it to the controller to optimize process parameters.
4、 Key points of operation and maintenance
Installation: Fixed in the slot of the electronic control board of the equipment, with both ends of the shielded wire grounded (≤ 0.5 Ω), away from the RF module.
Maintenance: Clean the gold finger every 3 months, calibrate the input/output accuracy every 6 months, and prioritize troubleshooting channel wiring for false connections.
Procurement: Prioritize the selection of original suppliers (such as Jiuzhan Automation), and verify the accuracy report and serial number traceability of the signal upon arrival.
5、 Technical value
High precision signal conversion ensures stable process parameters, channel isolation design reduces interference, is compatible with multiple device systems, and reduces the difficulty of equipment upgrades and renovations.
AMAT Applied Materials 0190-01270模拟 I/O PCB 卡 产品展示
产品视频
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218