AMAT Applied Materials 0010-13143射频模块组件
1.产 品 资 料 介 绍：
- 等离子体激励供电：向刻蚀机反应腔输出稳定射频能量，激励工艺气体电离形成等离子体，通过功率调节控制等离子体密度，适配 14nm 及以下制程需求。
- 工艺信号反馈调节：接收射频匹配组件的反射功率信号（阈值≤5% 入射功率），经内部电路解调后传输至控制模块，实现输出功率毫秒级动态补偿。
- 设备安全联锁响应：与射频互锁模块（如 0100-35565）联动，当检测到腔体泄漏或门体未关时，0.05s 内切断射频输出并触发报警，符合 SEMI S8 安全标准。
AMAT Applied Materials 0010-13143射频模块组件 英文资料：
1、 Core positioning
AMAT 0010-13143 is the "RF signal center" of semiconductor plasma technology, integrating transmission module, reception module, and control circuit. It is responsible for converting control instructions into stable RF energy output to the reaction chamber, while receiving feedback signals to achieve dynamic power adjustment. It adopts anti-interference shielding design and high-precision modulation technology, adapts to Class 100 clean environment and 13.56MHz mainstream process frequency band, and ensures the plasma stability of core processes such as etching and deposition.
2、 Key parameters
Category
Specifications
RF characteristics
Working frequency band 13.56MHz ± 0.1%, output power adjustable from 0-1500W
Signal performance
Modulation method supports ASK/FSK, receiving sensitivity ≤ -120dBm, power accuracy ± 1% FS
Control interface
Integrated RS-485 communication interface, 2-channel digital I/O control terminal
Environmental adaptation
-10-65 ℃, humidity<80%, no condensation, anti EMI interference (EN 61000-6-2)
Security features
Overpower protection (1.2 times rated value), over temperature protection (triggered at 75 ℃), RF leakage alarm
Compatibility
Compatible with AMAT 0100-66025 control module, 0041-78374 RF matching component, 0100-02839 rack component
3、 Core applications
Plasma excitation power supply: outputting stable RF energy to the reaction chamber of the etching machine, exciting the ionization of process gas to form plasma, controlling the plasma density through power regulation, and adapting to process requirements of 14nm and below.
Process signal feedback adjustment: Receive the reflected power signal of the RF matching component (threshold ≤ 5% incident power), demodulate it through internal circuits, and transmit it to the control module to achieve millisecond level dynamic compensation of output power.
Equipment safety interlock response: In conjunction with the RF interlock module (such as 0100-35565), when a cavity leak or door failure is detected, the RF output is cut off and an alarm is triggered within 0.05 seconds, in compliance with SEMI S8 safety standards.
AMAT Applied Materials 0010-13143射频模块组件 产品展示
产品视频
3.其他产品
KEB A3.SM.000-62DY 伺服电机
DEIF PPU-3 电源管理系
Schneider C400/10/1/1/1/00 伺服驱动器
4.其他英文产品
NI SCXI-1193 Switch mold piece
GE IS215VCMIH2CA IS200VCMIH2CAA Gas turbine module
PP885 3BSE069276R1 Touch screen
| 6ES5312-5CA12 | 6SC9711-0AL0 | 6DD2920-0XB01 |
| 6ES5312-5AA31 | CACR-PR01KA4BU | 6ES5187-5UA11 |
| 6ES5311-3KA11 | 6SC6030-2AA02 | 6DD2920-0WB00 |
| 6ES5308-3UA12 | 6SC9711-0AB0 | 6ES5155-3UA11 |
| 6ES5306-7LA11 | CACR-IR151515F | 6DD2920-0BF0 |
| 6ES5305-7LA11 | CACR-HR03BBY75 | 6ES5451-4UA13 |
| 6ES5301-3AB13 | 6SC9830-0AB20 | 6DD2920-0BE0 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
