AMAT Applied Materials 0100-9066气体面板分析模块
1.产 品 资 料 介 绍：
关键技术参数
主要功能与特点
应用领域
AMAT Applied Materials 0100-9066气体面板分析模块 英文资料：
AMAT Applied Materials 0100-9066 is a high-precision, modular gas panel analysis module used for real-time online analysis of process gases in semiconductor and flat panel display manufacturing, enabling rapid detection and precise control of multi-component gases.
Key technical parameters
Project Indicator Description
Analysis principle: Silicon based microinjection+capillary column separation+NEMS/μ TCD detection for microinjection, with high separation efficiency and good stability
Detection range sub ppm~% can detect permanent gases, light/heavy alkanes VOCs、 Sulfides, etc
Detection limit C6+<1 ppm (VOCs pre concentrated Multi channel synchronous detection with analysis time ranging from seconds to tens of seconds, providing fast feedback The typical flow rate of carrier gases He, H2, N2, Ar, and synthetic dry air is about 1 ml/min Sample pressure>1.5 bar compatible with most process gas supplies Working temperature of 50~160 ℃ meets the requirements of high-temperature process environment Size/Weight Approximately 14.7 × 5.15 × 11.4 cm/0.6 kg Compact and easy to integrate Main functions and features Multi component synchronous analysis: It can simultaneously detect dozens of gases such as O2, N2, CO, CO2, H2, CH4, and VOCs (such as BTEX), and is suitable for processes such as etching, deposition, and cleaning. High sensitivity and fast response: ppb level detection capability, second level feedback, able to capture small changes in process gases in a timely manner. Modular design: plug and play, flexible replacement of chromatography columns and detectors, adaptable to different process requirements. Low carrier gas consumption: about 1 ml/min, reducing operating costs and minimizing exhaust emissions. Fault self diagnosis and alarm: Equipped with pressure/flow sensors, it automatically alarms and triggers protection in case of abnormalities to prevent process accidents. Programmable control: supports custom analysis sequences and threshold settings, and can be integrated with factory automation systems. Application field Semiconductor manufacturing (chip manufacturing, wafer processing) Flat panel display (LCD, OLED) Photovoltaic cell production vacuum coating Research and Quality Control Laboratory AMAT Applied Materials 0100-9066气体面板分析模块 产品展示 产品视频 3.其他产品 SIEMENS 6GK1143-0TB01 通信处理器板 4.其他英文产品 ABB CI840A 3BSE041882R1 CPU module The content is from Ruichang Mingsheng Automation Equipment Co., LTD Contact: +86 15270269218
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FBM207 P0914TD Channels of contact module
GDB021BE05 HIEE300766R0005 Control card745-W2-P5-G5-HI-A-L-R-E 8030-RIM-121 X-AI 32 02 745-W2-P5-G5-HI-A-E-H 8030-RIM-101 X-FTA 009 02L 745-W2-P5-G5-HI-A-E 8030-R1M-185A X-FTA 008 02L 745-W2-P5-G5-HI-A 8030-PV-28 X-FTA 007 02L 745-W2-P5-G5-HI 8030-PS-70 X-FTA 006 02L 745-W2-P1-G1-LO-E 8030-PS-51 X-FTA 006 01L 745-W2-P1-G1-HI-T-H 8030-PS-41 X-FTA 005 02L 745-W2-P15-G1-LO-A-R 8030-RIM-331 X-FTA 003 02L 02R
