AMAT Applied Materials AM9090-00923IT真空控制底盘

1.产 品 资 料 介 绍：

产品概述

AMAT E-710K126X 数字控制器是 Applied Materials 半导体设备中的核心控制模块，用于管理和调节设备各子系统的运行状态。该控制器通过数字化信号处理，实现精确的工艺控制、设备协调和状态监控，是确保半导体工艺精度、稳定性和安全性的关键组件。

技术参数（推断与行业常规）

• 类型：数字控制器（Digital Controller）

• 控制方式：基于数字信号处理（DSP）的闭环控制

• 接口类型：多通道输入输出接口，支持模拟信号、数字信号及通讯总线

• 适用模块：加热器、射频匹配组件、传感器、执行机构等

• 数据处理能力：高速实时处理信号与反馈，实现工艺参数精确控制

• 可靠性设计：抗电磁干扰、高温、振动环境，适合洁净室运行

• 兼容设备：Applied Materials 各类沉积（CVD/PVD）、刻蚀（Etch）、离子注入及热处理设备

应用场景

1. 工艺精密控制

   • 控制加热器、射频模块、气体流量、阀门等，实现高精度工艺条件。

2. 子系统协调

   • 协调设备内部各模块运行，保证生产线同步性和效率。

3. 状态监控与报警

   • 实时采集各子系统参数，异常时触发报警或保护逻辑，保障设备安全。

4. 数据记录与追溯

   • 对工艺过程数据进行采集与存储，为生产质量追溯和优化提供依据。

AMAT Applied Materials AM9090-00923IT真空控制底盘  英文资料：

Product Overview

The AMAT E-710K126X digital controller is the core control module in Applied Materials semiconductor equipment, used to manage and regulate the operating status of various subsystems of the equipment. This controller achieves precise process control, equipment coordination, and status monitoring through digital signal processing, and is a key component to ensure the accuracy, stability, and safety of semiconductor processes.

Technical parameters (inference and industry norms)

Type: Digital Controller

Control method: Closed loop control based on digital signal processing (DSP)

Interface type: Multi channel input/output interface, supporting analog signals, digital signals, and communication bus

Applicable modules: heaters, RF matching components, sensors, actuators, etc

Data processing capability: high-speed real-time processing of signals and feedback, achieving precise control of process parameters

Reliability design: resistant to electromagnetic interference, high temperature, vibration environment, suitable for clean room operation

Compatible devices: Applied Materials various deposition (CVD/PVD), etching (Etch), ion implantation, and heat treatment equipment

Application scenarios

Process precision control

Control heaters, RF modules, gas flow rates, valves, etc. to achieve high-precision process conditions.

Subsystem coordination

Coordinate the operation of various modules within the equipment to ensure the synchronization and efficiency of the production line.

Status monitoring and alarm

Real time collection of subsystem parameters, triggering alarms or protection logic in case of abnormalities to ensure equipment safety.

Data recording and tracing

Collect and store process data to provide a basis for production quality traceability and optimization.

AMAT Applied Materials AM9090-00923IT真空控制底盘  产品展示      

 产品视频

3.其他产品

HORNER ELECTRIC HE693OIU100接口单元
HORNER ELECTRIC HE693DAC410B隔离模拟输出
HORNER ELECTRIC HE693RTM705B主通信模块

4.其他英文产品

ALSTOM LE109A-1 Communication circuit board
PROSOFT MVI56-MNETR module
PROSOFT MVI94-GSC interface module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218