AMAT Applied Materials 0190-24116分析输入输出模块
1.产 品 资 料 介 绍:
产品概述
AMAT 0190-24116 分析输入输出模块是 Applied Materials 半导体设备中的关键信号接口模块。它用于采集、处理和输出设备传感器及工艺监控信号,实现工艺参数的精确监控和控制。该模块可连接温度传感器、压力传感器、流量计等多种监测装置,将信号传输至主控制器或数字控制系统,为半导体工艺提供实时数据反馈和控制依据。
技术参数(典型特征)
类型:分析输入/输出模块(I/O Module)
功能:信号采集、信号输出、数据传输
信号类型:模拟量(如电压、电流)及数字量输入输出
通道数量:多通道设计,可同时处理多路输入输出(具体数量依设备而定)
接口形式:标准模块化插槽接口,兼容控制系统总线
工作环境:半导体设备内部,耐高温、抗干扰、洁净室兼容
适用设备:Applied Materials 各类沉积(CVD/PVD)、刻蚀(Etch)、离子注入、热处理设备
应用场景
工艺数据采集
采集温度、压力、流量、液位等传感器数据,提供实时反馈。
控制信号输出
向阀门、加热器、泵、执行器等子系统输出控制指令。
设备监控与报警
监测工艺参数异常并向控制器发送信号,实现报警和保护。
工艺优化与追溯
提供精确的输入输出数据,为工艺优化和质量追溯提供依据。
AMAT Applied Materials 0190-24116分析输入输出模块 英文资料:
Product Overview
AMAT 0190-24116 Analysis Input/Output Module is a key signal interface module in Applied Materials semiconductor equipment. It is used to collect, process, and output device sensors and process monitoring signals, achieving precise monitoring and control of process parameters. This module can connect various monitoring devices such as temperature sensors, pressure sensors, flow meters, etc., and transmit signals to the main controller or digital control system, providing real-time data feedback and control basis for semiconductor processes.
Technical parameters (typical features)
Type: Analysis Input/Output Module (I/O Module)
Function: Signal acquisition, signal output, data transmission
Signal types: analog (such as voltage, current) and digital input/output
Number of channels: Multi channel design, capable of processing multiple inputs and outputs simultaneously (the specific number depends on the device)
Interface form: Standard modular slot interface, compatible with control system bus
Working environment: Inside semiconductor equipment, high temperature resistance, anti-interference, and cleanroom compatibility
Applicable equipment: Various deposition (CVD/PVD), etching (Etch), ion implantation, and heat treatment equipment of Applied Materials
Application scenarios
Process data collection
Collect sensor data such as temperature, pressure, flow rate, and liquid level, and provide real-time feedback.
Control signal output
Output control commands to subsystems such as valves, heaters, pumps, and actuators.
Equipment monitoring and alarm
Monitor abnormal process parameters and send signals to the controller to achieve alarm and protection.
Process optimization and traceability
Provide accurate input and output data to provide a basis for process optimization and quality traceability.
AMAT Applied Materials 0190-24116分析输入输出模块 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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