AMAT Applied Materials 0100-09104接触器联锁板

1.产 品 资 料 介 绍：

产品概述

AMAT 0100-09104 接触器联锁板是 Applied Materials 半导体设备中的关键电气安全和控制模块。它主要用于管理接触器（Contactor）之间的联锁关系，确保设备电源和控制回路在操作或维护过程中能够安全断开或接通。该模块在设备启动、停机及紧急保护操作中起到核心作用，是保障设备和操作人员安全的关键组件。

技术参数（典型特征）

• 类型：接触器联锁板 / Contactor Interlock Module

• 功能：电气安全联锁、信号管理、状态反馈

• 接口形式：多通道电气接口，可连接接触器及控制系统

• 输入输出信号：数字量输入输出，用于接收控制信号及输出状态信号

• 工作环境：洁净室兼容，耐高温、抗振动

• 兼容设备：Applied Materials 各类沉积（CVD/PVD）、刻蚀（Etch）、离子注入及热处理设备的电源和控制系统

应用场景

1. 设备电源安全管理

   • 控制主接触器及子系统接触器的联锁操作，防止电源误操作。

2. 紧急停机保护

   • 在设备发生异常或紧急情况下快速断开电路，保障设备和人员安全。

3. 维护操作安全

   • 在维护或模块更换过程中，通过联锁板确保相关电路安全断电。

4. 状态监控与反馈

   • 向主控制器反馈接触器状态，支持设备安全逻辑判断和自动化控制。

AMAT Applied Materials 0100-09104接触器联锁板  英文资料：

Product Overview

The AMAT 0100-09104 contactor interlock board is a critical electrical safety and control module in Applied Materials semiconductor equipment. It is mainly used to manage the interlocking relationship between contactors, ensuring that the equipment power supply and control circuit can be safely disconnected or connected during operation or maintenance. This module plays a core role in equipment startup, shutdown, and emergency protection operations, and is a critical component for ensuring the safety of equipment and operators.

Technical parameters (typical features)

Type: Contactor Interlock Module

Function: Electrical safety interlock, signal management, status feedback

Interface form: Multi channel electrical interface, capable of connecting contactors and control systems

Input/output signal: digital input/output, used to receive control signals and output status signals

Work environment: cleanroom compatible, high temperature resistant, vibration resistant

Compatible devices: Power and control systems for various deposition (CVD/PVD), etching (Etch), ion implantation, and heat treatment equipment of Applied Materials

Application scenarios

Equipment power safety management

Control the interlocking operation of the main contactor and subsystem contactor to prevent power misoperation.

Emergency stop protection

Quickly disconnect the circuit in case of equipment malfunction or emergency, ensuring the safety of equipment and personnel.

Maintain operational safety

During maintenance or module replacement, ensure safe power-off of relevant circuits through interlocking boards.

Status monitoring and feedback

Feedback the status of the contactor to the main controller, supporting equipment safety logic judgment and automation control.

AMAT Applied Materials 0100-09104接触器联锁板 产品展示      

 产品视频

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4.其他英文产品

PROSOFT MVI94-GSC interface module
NI SCXI-1162 Programmable power supply
KOKUSAI SMPCONT-A3B Main control circuit board

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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