AMAT Applied Materials 0010-10371传感器盒

1.产 品 资 料 介 绍：

产品概述

AMAT 0010-10371 传感器盒是 Applied Materials 半导体设备中的关键检测模块，用于集中安装和管理各种工艺传感器。该模块能够收集温度、压力、流量、湿度等多种工艺参数，通过集成接口将信号传输至控制器或数字控制系统，实现对半导体设备工艺环境的实时监控和精确调节。传感器盒是保障设备工艺稳定性、提高良率的重要组成部分。

技术参数（典型特征）

• 类型：传感器盒 / Sensor Box

• 功能：集中安装传感器、采集工艺参数、信号传输

• 支持传感器类型：温度传感器、压力传感器、流量计、湿度传感器等

• 接口形式：多通道电气接口，支持模拟量和数字量信号传输

• 工作环境：洁净室兼容，耐高温、抗振动

• 兼容设备：Applied Materials 各类沉积（CVD/PVD）、刻蚀（Etch）、离子注入、热处理设备

• 信号处理：可与控制器或数字控制系统实现闭环控制

应用场景

1. 工艺参数监控

   • 实时采集腔体及工艺环境的温度、压力、流量等参数。

2. 数据传输与控制

   • 将传感器信号传输至控制系统，用于自动调节工艺参数。

3. 工艺优化与追溯

   • 提供精确数据支持工艺优化及产品质量追溯。

4. 设备维护和模块替换

   • 模块化设计便于拆装与更换，提高设备维护效率。

AMAT Applied Materials 0190-35252气动室组件 英文资料：

Product Overview

The AMAT 0010-10371 sensor box is a key detection module in Applied Materials semiconductor equipment, used for centralized installation and management of various process sensors. This module can collect various process parameters such as temperature, pressure, flow rate, humidity, etc., and transmit signals to the controller or digital control system through an integrated interface, achieving real-time monitoring and precise adjustment of the semiconductor equipment process environment. The sensor box is an important component in ensuring equipment process stability and improving yield.

Technical parameters (typical features)

Type: Sensor Box

Function: Centralized installation of sensors, collection of process parameters, signal transmission

Supporting sensor types: temperature sensor, pressure sensor, flow meter, humidity sensor, etc

Interface form: Multi channel electrical interface, supporting analog and digital signal transmission

Work environment: cleanroom compatible, high temperature resistant, vibration resistant

Compatible devices: Applied Materials various deposition (CVD/PVD), etching (Etch), ion implantation, heat treatment equipment

Signal processing: can achieve closed-loop control with controllers or digital control systems

Application scenarios

Process parameter monitoring

Real time collection of temperature, pressure, flow rate and other parameters of the chamber and process environment.

Data transmission and control

Transmit sensor signals to the control system for automatic adjustment of process parameters.

Process optimization and traceability

Provide precise data to support process optimization and product quality traceability.

Equipment maintenance and module replacement

Modular design facilitates disassembly and replacement, improving equipment maintenance efficiency.

AMAT Applied Materials  0190-35252气动室组件 产品展示      

 产品视频

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4.其他英文产品

CMA120 3DDE300400 touch screen
CMA131 3DDE300411 Industrial control module
CMA132 3DDE300412 control module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218