AMAT Applied Materials 9101-1745伺服驱动器
1.产 品 资 料 介 绍:
AMAT Applied Materials 9101-1745 伺服驱动器
核心技术参数
产品特点
典型应用
安装与维护建议
AMAT Applied Materials 9101-1745伺服驱动器 英文资料:
AMAT Applied Materials 9101-1745 Servo Drive
AMAT 9101-1745 is a high-performance servo driver designed specifically for semiconductor manufacturing equipment, used for precise control of servo motors to achieve high-precision motion control of wafer transfer systems, robotic arms, and precision positioning mechanisms.
Core technical parameters
Project specifications
Three control modes: position, speed, and torque
Motor type supports DC/AC servo motors
Feedback Interface Encoder Interface (Incremental/Absolute)
Communication interface RS-485/Industrial Ethernet (by model)
Power supply voltage 24-48VDC or 200-240VAC
The control accuracy can reach 1/1000 of the encoder resolution
Protection function: overcurrent/overvoltage/overheating/overload protection
Working environment 0-55 ° C, relative humidity 20-80%
Product Features
High precision control: using advanced servo control algorithms to achieve nanometer level positioning accuracy
Fast response: High speed processor and optimized control loop ensure rapid dynamic response
Stable and reliable: Industrial grade design, suitable for harsh working environments of semiconductor equipment
Flexible configuration: supports multiple control modes and feedback types to meet different application needs
Complete protection: Comprehensive electrical protection function to ensure safe operation of equipment
Typical Applications
Accurate position control of wafer transfer robot
High speed positioning system for lithography machine workbench
Precision motion mechanism of etching/deposition equipment
Automatic alignment system for detection equipment
Installation and maintenance recommendations
Pre-installation preparation
Confirm that the power specifications match the driver
Check that the motor parameters are consistent with the driver settings
Confirm that the encoder type and wiring are correct
Debugging points
First, perform motor identification and parameter self-tuning
Gradually adjust control parameters to optimize dynamic performance
Set reasonable soft limit and protection parameters
AMAT Applied Materials 9101-1745伺服驱动器 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218