AMAT Applied Materials 0020-22584电阻计量器
1.产 品 资 料 介 绍:
AMAT Applied Materials 0020-22584 电阻计量器
核心功能
技术特点
典型应用
安装与维护建议
AMAT Applied Materials 0020-22584电阻计量器 英文资料:
AMAT Applied Materials 0020-22584 Resistance Meter
AMAT 0020-22584 is a high-precision resistance measuring instrument designed specifically for semiconductor manufacturing equipment. It is used to accurately detect and monitor changes in the resistance values of key components of the equipment, ensuring process stability and safe operation of the equipment.
core functionality
High precision measurement: achieving precise measurement of resistance ranging from micro ohms to megaohms
Wide range coverage: automatic switching of multiple gears to meet different measurement needs
Real time monitoring: supports continuous measurement mode, tracks the trend of resistance changes in real time
Temperature compensation: Built in temperature compensation algorithm to eliminate the influence of environmental temperature
High stability: Industrial grade design, suitable for harsh working environments of semiconductor equipment
Technical Features
Measurement accuracy: up to ± 0.01% reading+± 0.001% full scale
Resolution: up to 10 micro ohms
Measurement speed: adjustable in multiple levels, with a maximum of 100 readings per second
Output interface: analog output and digital communication interface
Self calibration function: Built in calibration program to ensure long-term measurement accuracy
Compact design: suitable for internal integrated installation of equipment
Typical Applications
Heater monitoring: Real time detection of changes in heating element resistance to prevent malfunctions
Temperature sensor measurement: Accurate measurement of RTD platinum resistance temperature sensor
Equipment health monitoring: monitoring the wear status of mechanical components through resistance changes
Safety circuit detection: monitor the resistance of emergency stop circuit and safety interlock circuit
Process control: indirectly monitoring process status through resistance changes
Installation and maintenance recommendations
Installation precautions
Ensure reliable connection between the measuring terminal and the object being measured
Stay away from strong electromagnetic interference sources
Avoid direct baking in high temperature environments
Usage and maintenance
Regularly execute self calibration procedures
Check the measuring leads to prevent aging or corrosion
Keep the instrument clean and avoid dust accumulation
Fault handling
Check the leads and connection points when measuring abnormalities
Confirm whether the instrument needs to be recalibrated
If necessary, use standard resistors for comparative testing
AMAT Applied Materials 0020-22584电阻计量器 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218