AMAT Applied Materials 0900-01053过滤器

1.产 品 资 料 介 绍：

AMAT Applied Materials 0900-01053 过滤器

核心规格

功能特点

• 超高纯度：可将气体纯度提升至 ppb 级，满足半导体工艺要求
• 耐腐蚀设计：适用于 NF₃、Cl₂、SiH₄等腐蚀性气体
• 低流量阻力：优化滤芯结构，减少压降影响
• 快速更换：采用 VCR 或 Swagelok 接口，更换便捷
• 多种滤芯选择：可根据气体类型和纯度要求选择不同滤芯材料

典型应用

• 刻蚀工艺气体过滤
• CVD/PVD 前驱体气体净化
• 离子注入机气体纯化
• 高纯载气 (Ar、N₂) 过滤
• 设备吹扫气体预处理

安装与维护建议

1. 安装方向：
   • 按照外壳箭头指示方向安装，确保正确流向
   • 避免安装在热源或振动源附近
2. 连接注意事项：
   • 使用扭矩扳手按推荐力矩紧固
   • 确保密封面清洁无划痕
3. 维护周期：
   • 建议每 3–6 个月更换一次滤芯
   • 高流量或高杂质环境下应缩短更换周期
4. 更换步骤：
   • 关闭上下游阀门并排空系统
   • 佩戴适当防护装备
   • 按正确扭矩拆卸旧过滤器
   • 安装新过滤器并检漏

AMAT Applied Materials 0900-01053过滤器 英文资料：

AMAT Applied Materials 0900-01053 Filter

AMAT 0900-01053 is a high-precision gas filter designed specifically for semiconductor manufacturing equipment to remove particles, moisture, and chemical impurities from process gases, ensuring that the purity of the gas entering the reaction chamber meets ppb level standards.

Core specifications

Project specification remarks

Filtering accuracy of 0.003-0.01 μ m can remove submicron particles

Maximum working pressure of 300 PSI (20.7 bar) suitable for high-pressure gas systems

Working temperature range -20 ° C~+60 ° C, compatible with multiple process conditions

Interface size 1/4 "VCR or Swagelok high vacuum/high-purity connection

Material: 316L stainless steel shell+PTFE filter cartridge, corrosion-resistant and low adsorption

Flow capacity of 5-50 slpm depends on gas type and pressure difference

Filter cartridge type: sintered metal/PTFE composite optimized for different gas characteristics

Shell polishing and electrolytic polishing (EP) reduce the risk of particle detachment

Features

Ultra high purity: can increase gas purity to ppb level, meeting semiconductor process requirements

Corrosion resistant design: suitable for corrosive gases such as NF ∝, Cl ₂, SiH ₄, etc

Low flow resistance: Optimize filter structure to reduce pressure ｄｒｏｐ impact

Quick replacement: using VCR or Swagelok interface, easy to ｒｅｐｌａｃｅ

Multiple filter options: Different filter materials can be selected according to gas type and purity requirements

Typical Applications

Etching process gas filtration

CVD/PVD precursor gas purification

Ion implantation machine gas purification

High purity carrier gas (Ar, N ₂) filtration

Equipment blowing gas pretreatment

Installation and maintenance recommendations

Installation direction:

Install in the direction indicated by the arrow on the casing to ensure the correct flow direction

Avoid installing near heat or vibration sources

Connection precautions:

Use a torque wrench to tighten to the recommended torque

Ensure that the sealing surface is clean and free of scratches

Maintenance cycle:

Suggest replacing the filter element every 3-6 months

The replacement cycle should be shortened in high flow or high impurity environments

Replacement steps:

Close the upstream and downstream valves and drain the system

Wear appropriate protective equipment

Disassemble the old filter with the correct torque

Install a new filter and perform leak detection

AMAT Applied Materials  0900-01053过滤器 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218