AMAT Applied Materials 0010-19188冷却升降机
1.产 品 资 料 介 绍：
核心规格
功能特点
典型应用
AMAT Applied Materials 0010-19188冷却升降机 英文资料：
The AMAT Applied Materials 0010-19188 cooling elevator is a key component in semiconductor equipment wafer transfer systems, integrating lifting and cooling functions. It is used to efficiently and stably transfer wafers between process chambers and wafer transfer tracks, and quickly cool the wafers during the lifting process to ensure process accuracy and equipment stability.
Core specifications
Project specification remarks
Suitable for wafer sizes of 200mm/300mm, compatible with mainstream wafer production lines
The lifting stroke is customized according to the model (commonly 300-600 mm) to meet different chamber heights
Adjustable servo/stepper motor drive with lifting speed of 0-200 mm/s
Carrying capacity 3-5 kg including wafer carrier
Cooling method: optional combination of air cooling/water cooling/semiconductor cooling
Temperature control range: Room temperature -80 ℃, accuracy ± 0.5 ℃
Repeated positioning accuracy ± 0.05mm ensures wafer alignment
Interface types SECS/GEM, I ² C, RS-485 can be integrated into equipment control systems
Material: 316L stainless steel, high-purity alumina ceramic, corrosion-resistant, low particle generation
Features
Integrated lifting and cooling: reduces equipment space occupation and improves production efficiency.
High precision positioning: Ensure precise positioning of the wafer during transportation.
Rapid cooling: Shorten the cooling time of the wafer and improve the process rhythm.
Modular design: easy to maintain and upgrade, replaceable cooling module.
Low particle pollution: suitable for semiconductor environments with extremely high cleanliness requirements.
AMAT Applied Materials 0010-19188冷却升降机 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
