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AMAT Applied Materials 0110-00077步进驱动器模块

发布时间:2025-09-26人气:
  • AMAT Applied Materials 0110-00077步进驱动器模块
  • AMAT Applied Materials 0110-00077步进驱动器模块
  • AMAT Applied Materials 0110-00077步进驱动器模块

AMAT Applied Materials 0110-00077步进驱动器模块

1.产 品 资 料 介 绍:

AMAT 0110‑00077 是应用材料公司专为半导体设备设计的模拟型 VME 接口步进驱动器模块,主要用于晶圆传输、定位与对准系统,支持 2 相 4/6/8 线混合式步进电机,最高 1/256 细分,具备过流、过压、欠压及过热保护,广泛应用于 Endura、Centura 等平台。

核心规格

项目规格 / 特点备注
类型模拟式 VME 步进驱动器B 型 VME 接口
控制模式脉冲 / 方向、速度、位置闭环(编码器可选)编码器分辨率最高 2500 PPR
输出电流每相 0–3.0 A 可调恒流斩波控制
细分1/1、1/2、1/4…1/256拨码 / 电位器设置
供电电压DC 24–48 V典型 24 V
接口VME 总线(数据 / 控制)、电机 A/B 相、编码器、限位开关编码器差分输入
保护功能过流、过压、欠压、过热、短路、缺相故障输出触点
冷却方式强制风冷(板载散热片)环境温度 ≤50℃
应用晶圆传输、定位、对准配合 AMAT 机械臂

功能与优势

  • 高精度定位:支持编码器反馈,重复定位精度达 ±0.005 mm(依机械系统)。
  • 低噪声运行:自适应衰减与细分技术,降低低速振动与噪声。
  • 快速响应:动态响应时间 ≤100 μs,满足高速启停与插补运动。
  • 可靠性高:冗余保护与热管理设计,可在恶劣环境长期运行。
  • 易集成:标准 VME 接口,可直接接入 AMAT 设备控制背板。

安装与替代要点

  1. 安装
    • 固定于 VME 背板 B 型插槽,确保接地良好。
    • 电机接线按 A+/A-、B+/B- 顺序,避免接反。
    • 编码器采用差分输入,屏蔽线双端接地。
    • 限位开关常闭串联接入,确保安全。
  2. 替代验证
    • 确认接口与控制逻辑一致,尤其是 VME 时序。
    • 核对电流、电压与细分范围,必要时重调拨码与电位器。
    • 替代后进行原点回归与精度校准。

AMAT Applied Materials  0110-00077步进驱动器模块 英文资料:

AMAT 0110-00077 is an analog VME interface stepper driver module designed specifically for semiconductor equipment by Applied Materials. It is mainly used in wafer transfer, positioning, and alignment systems and supports a 2-phase 4/6/8-wire hybrid stepper motor with a maximum subdivision of 1/256. It has overcurrent, overvoltage, undervoltage, and overheat protection and is widely used in platforms such as Endura and Centura.

Core specifications

Project specifications/characteristics remarks

Type Analog VME Stepper Driver Type B VME Interface

Control mode pulse/direction, speed, position closed-loop (encoder optional) Encoder resolution up to 2500 PPR

Adjustable constant current chopper control with output current of 0-3.0 A per phase

Subdivision 1/1, 1/2, 1/4... 1/256 dial/potentiometer settings

Supply voltage DC 24-48 V, typical 24 V

Interface VME bus (data/control), motor A/B phase, encoder, limit switch encoder differential input

Protection function: output contacts for overcurrent, overvoltage, undervoltage, overheating, short circuit, and phase loss faults

Cooling method: forced air cooling (onboard heat sink), ambient temperature ≤ 50 ℃

Application of wafer transfer, positioning, alignment with AMAT robotic arm

Features and advantages

High precision positioning: Supports encoder feedback, with a repeat positioning accuracy of ± 0.005 mm (depending on the mechanical system).

Low noise operation: Adaptive attenuation and subdivision technology to reduce low-speed vibration and noise.

Quick response: Dynamic response time ≤ 100 μ s, meeting high-speed start stop and interpolation motion requirements.

High reliability: With redundant protection and thermal management design, it can operate for a long time in harsh environments.

Easy integration: Standard VME interface, can be directly connected to AMAT device control backplane.

Installation and replacement points

install

Fixed to the VME backplane B-slot to ensure good grounding.

The motor wiring should be in the order of A+/A -, B+/B - to avoid reverse connection.

The encoder adopts differential input and the shielded wire is grounded at both ends.

The limit switch is normally closed and connected in series to ensure safety.

Alternative verification

Confirm that the interface is consistent with the control logic, especially the VME timing.

Check the current, voltage, and subdivision range, and if necessary, reassign the code and potentiometer.

Perform origin regression and accuracy calibration after substitution.

AMAT Applied Materials 0110-00077步进驱动器模块 产品展示      

applied_materials_stepper_driver_pcb_amat_0110-00077_2.jpg

 产品视频

3.其他产品

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GJR2326500R1010 88VU01E模拟输出模块

4.其他英文产品

AMAT 0100-00169 Embedded control card
ABB ZPOW-591 digital protection relay
ABB ZINT-571 PROGRAMMED card

IC3600KMRA9531X135PRGALM2IC3600ADAF1
IC3600KMRA5531X135PRGALM1IC3600ADAD1A
IC3600KMRA2531X135PRGAJM1IC3600ADAD1
IC3600KHVD531X135PRGAAM3IC3600ADAA1A
IC3600KHVB2531X134EPRBNG1IC3600ACLS1B
IC3600KHDA2531X134EPRBMG1IC3600AAMA1G1E
IC3600EPZU1F531X134EPRBJG1IC3600AAMA1G1B
IC3600EPZU1E531X134EPRBHG1IC3600AAMA1F1

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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