AMAT Applied Materials 0190-18128遥控 I/O 模块
1.产 品 资 料 介 绍：
- 多类型信号兼容采集：支持模拟量（如 4-20mA 电流信号、0-10V 电压信号）与数字量（开关量、脉冲信号）的同步采集，可同时对接设备传感器（如压力传感器、流量传感器）、执行器（如电磁阀、伺服电机）的信号需求，无需额外信号转换模块，简化设备布线与集成流程。
- 高精度信号传输能力：模拟量信号采集精度达 ±0.1% F.S.，数字量信号响应延迟控制在微秒级，能精准捕捉半导体制程中细微的信号变化（如工艺腔压力波动、气体流量微调），为设备控制系统提供真实、可靠的底层数据支撑，避免因信号失真导致的工艺偏差。
- 抗干扰信号隔离设计：采用光电隔离与电磁屏蔽双重防护技术，模拟量通道隔离电压≥2500V AC，数字量通道隔离电压≥1500V AC，可有效抵御半导体设备运行中高频电机、高压电源产生的电磁干扰，确保信号在复杂电磁环境下仍能稳定传输，降低误触发风险。
- 宽温稳定运行特性：工作温度范围覆盖 - 40℃~70℃，能适应半导体洁净车间与设备内部的温度差异（如靠近加热腔的高温区域、气体冷却系统附近的低温区域），且在温度剧烈波动时，模块核心元器件性能衰减率低于 5%，保障信号处理功能持续稳定。
- 高防护等级结构：外壳采用 IP65 防护标准，搭配密封式端子接口，可有效阻挡洁净车间的粉尘、腐蚀性气体（如刻蚀工艺中的氟化物残留）侵入模块内部，同时具备一定的防水能力，避免设备维护时少量清洁液体渗入导致短路，延长模块使用寿命。
- 抗振动与冲击性能：通过军用级振动测试（10-500Hz，10g 加速度）与冲击测试（50g 峰值加速度，11ms 脉冲），能耐受半导体设备运行中机械传动部件（如机械臂、晶圆传输机构）产生的振动与瞬时冲击，防止模块内部焊点脱落、线路松动，确保长期可靠运行。
AMAT Applied Materials 0190-18128遥控 I/O 模块 英文资料：
1、 High reliability signal processing: adapted to the precise control requirements of semiconductor equipment
As the "signal transmission center" of semiconductor equipment, this remote control I/O module exhibits strong adaptability and stability in signal processing, with core features reflected in the following three aspects:
Multi type signal compatible acquisition: Supports synchronous acquisition of analog signals (such as 4-20mA current signals, 0-10V voltage signals) and digital signals (switch signals, pulse signals), and can simultaneously interface with device sensors (such as pressure sensors, flow sensors) and actuators (such as solenoid valves, servo motors) for signal requirements, without the need for additional signal conversion modules, simplifying device wiring and integration processes.
High precision signal transmission capability: The analog signal acquisition accuracy reaches ± 0.1% F.S., and the digital signal response delay is controlled at the microsecond level, which can accurately capture subtle signal changes in semiconductor processes (such as process chamber pressure fluctuations and gas flow fine-tuning), providing real and reliable underlying data support for equipment control systems and avoiding process deviations caused by signal distortion.
Anti interference signal isolation design: Adopting dual protection technology of photoelectric isolation and electromagnetic shielding, the isolation voltage of analog channels is ≥ 2500V AC, and the isolation voltage of digital channels is ≥ 1500V AC, which can effectively resist electromagnetic interference generated by high-frequency motors and high-voltage power supplies during the operation of semiconductor equipment, ensuring stable signal transmission in complex electromagnetic environments and reducing the risk of false triggering.
2、 Strict environmental tolerance: suitable for extreme working conditions in semiconductor manufacturing
Based on AMAT's specialized design for the semiconductor industry, this module has outstanding environmental adaptability and can cope with multiple harsh conditions during equipment operation:
Wide temperature stable operation characteristics: The working temperature range covers -40 ℃~70 ℃, which can adapt to temperature differences between semiconductor clean rooms and equipment interiors (such as high temperature areas near heating chambers and low temperature areas near gas cooling systems). In addition, during severe temperature fluctuations, the performance degradation rate of module core components is less than 5%, ensuring the continuous stability of signal processing functions.
High protection level structure: The shell adopts IP65 protection standard and is equipped with sealed terminal interfaces, which can effectively prevent dust and corrosive gases (such as fluoride residues in etching process) from entering the module interior in the clean workshop. At the same time, it has a certain waterproof ability to avoid short circuits caused by a small amount of cleaning liquid infiltration during equipment maintenance, and extend the service life of the module.
Anti vibration and impact performance: Through military grade vibration testing (10-500Hz, 10g acceleration) and impact testing (50g peak acceleration, 11ms pulse), it can withstand the vibration and instantaneous impact generated by mechanical transmission components (such as robotic arms and wafer transfer mechanisms) during the operation of semiconductor equipment, prevent the detachment of solder joints and loose circuits inside the module, and ensure long-term reliable operation.
AMAT Applied Materials 0190-18128遥控 I/O 模块 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
