AMAT Applied Materials 0010-26029电源匹配组件
1.产 品 资 料 介 绍:
- 宽幅电压调节范围:支持输入电压 100-240V AC(50/60Hz)宽幅适配,可兼容全球不同地区的电网电压标准,无需额外配置电压转换器;输出电压可根据设备模块需求精准调节,涵盖 3.3V DC、5V DC、12V DC、24V DC 等常用工业级电压档位,输出电压精度达 ±0.5%,确保半导体设备敏感元器件(如传感器、控制芯片)获得稳定供电,避免因电压波动导致的设备性能偏差。
- 多通道独立供电设计:具备 4-8 路独立输出通道(具体依型号配置),每路通道可单独设定输出电流(最大单路电流支持 10A),且通道间隔离度≥2500V AC,能同时为设备的控制系统(如 PLC)、执行机构(如电磁阀)、监测模块(如温度传感器)等不同负载供电,避免单一模块故障影响其他通道供电,提升设备整体供电可靠性。
- 动态负载响应能力:采用高频开关电源架构,负载调整率≤0.2%,当半导体设备负载在 0-100% 范围内动态变化时(如机械臂启停、加热腔功率调节),输出电压波动可控制在 50mV 以内;同时具备快速响应能力(响应时间≤50μs),能瞬间补偿负载突变带来的电压跌落,保障设备核心模块(如工艺控制单元)供电不中断,避免制程中断导致的晶圆报废。
- 多重电气安全保护:集成过电压、过电流、过载、短路、过温五重保护功能。当输出电压超过额定值 120% 时,过电压保护模块立即切断输出;输出电流超过额定值 150% 或负载短路时,短路保护快速触发(响应时间≤10μs),防止损坏电源组件与下游设备;同时内置温度监测传感器,当组件内部温度超过 85℃时,自动启动过热保护,避免元器件烧毁,保障设备运行安全。
- 绝缘与接地保护:输入与输出之间绝缘电阻≥100MΩ,绝缘强度达 3000V AC/1min,有效防止漏电事故发生;配备独立接地端子,接地电阻≤1Ω,可快速释放静电与漏电流,避免静电击穿半导体设备中的精密芯片(如 FPGA、MCU),同时符合 SEMI S2 半导体设备安全标准,满足洁净车间电气安全规范。
AMAT Applied Materials 0010-26029电源匹配组件 英文资料:
1、 High precision power supply adaptation: meets the multi module power supply needs of semiconductor equipment
As the "power regulation center" of semiconductor equipment, this power matching component has precise voltage and current adaptation capabilities as its core, meeting the differentiated power supply needs of different functional modules of the equipment:
Wide range voltage regulation: Supports wide range adaptation of input voltage 100-240V AC (50/60Hz), compatible with grid voltage standards in different regions around the world, without the need for additional voltage converters; The output voltage can be precisely adjusted according to the requirements of the device module, covering commonly used industrial grade voltage levels such as 3.3V DC, 5V DC, 12V DC, 24V DC, etc. The output voltage accuracy reaches ± 0.5%, ensuring stable power supply for sensitive components of semiconductor devices (such as sensors and control chips) and avoiding equipment performance deviations caused by voltage fluctuations.
Multi channel independent power supply design: it has 4-8 independent output channels (configured according to the model), each channel can set the output current independently (the maximum single channel current supports 10A), and the isolation between channels is ≥ 2500V AC, which can simultaneously supply power to different loads such as the equipment control system (such as PLC), actuator (such as solenoid valve), monitoring module (such as temperature sensor), so as to avoid the failure of a single module affecting the power supply of other channels, and improve the overall power supply reliability of the equipment.
Dynamic load response capability: Adopting a high-frequency switching power supply architecture, the load adjustment rate is ≤ 0.2%. When the load of the semiconductor equipment dynamically changes within the range of 0-100% (such as the start stop of the robotic arm and the power adjustment of the heating chamber), the output voltage fluctuation can be controlled within 50mV; Simultaneously possessing fast response capability (response time ≤ 50 μ s), it can instantly compensate for voltage drops caused by sudden load changes, ensuring uninterrupted power supply to equipment core modules (such as process control units) and avoiding wafer scrap caused by process interruptions.
2、 Comprehensive security protection: ensuring the power supply safety of semiconductor equipment
In response to the high-value and high-risk operating characteristics of semiconductor equipment, the power matching component has undergone multiple optimizations in safety protection to reduce the risk of power supply failures
Multiple electrical safety protection: integrated with five protection functions including overvoltage, overcurrent, overload, short circuit, and over temperature. When the output voltage exceeds 120% of the rated value, the overvoltage protection module immediately cuts off the output; When the output current exceeds 150% of the rated value or the load is short circuited, the short-circuit protection is triggered quickly (response time ≤ 10 μ s) to prevent damage to the power components and downstream equipment; At the same time, it is equipped with a temperature monitoring sensor, which automatically activates overheating protection when the internal temperature of the component exceeds 85 ℃, avoiding component burnout and ensuring the safe operation of the equipment.
Insulation and grounding protection: The insulation resistance between input and output is ≥ 100M Ω, and the insulation strength reaches 3000V AC/1min, effectively preventing leakage accidents; Equipped with an independent grounding terminal with a grounding resistance of ≤ 1 Ω, it can quickly release static electricity and leakage current, avoiding electrostatic breakdown of precision chips (such as FPGA and MCU) in semiconductor equipment
AMAT Applied Materials 0010-26029电源匹配组件 产品展示
产品视频
3.其他产品
MLJ1005B010H00C 控制器模块
MC-4/11/03/400 伺服驱动器
MOISTURE.IQ-1-6-1-1-1-0-0 分析仪
4.其他英文产品
WATLOW ANAFAZE CLS216 cable
OMACO GF0-57CQD-002 Touch screen
NI GPIB-140A/2 total line expander
710-658669-00 | 8005-MP-24 | 4136J54G4 |
710-658363-20 | 8005-LTV-101 | 4136J56-G1 |
710-658340-20 | 8005-LTC-101 | 8030-DLM-110 |
710-658232-20 | 8005-LNV-101 | 8030-DIM-101 |
710-658232-00 | 8005-EPS-51 | 8030-CRM-931 |
710-658172-20 | 8005-EPS-50 | 8030-CRM-720 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218