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Huttinger C40-0647 D40-647.1射频控制单元

发布时间:2025-09-11人气:
  • Huttinger C40-0647 D40-647.1射频控制单元
  • Huttinger C40-0647 D40-647.1射频控制单元
  • Huttinger C40-0647 D40-647.1射频控制单元

 Huttinger   C40-0647 D40-647.1射频控制单元

1.产 品 资 料 介 绍:

Huttinger C40-0647 / D40-647.1 射频控制单元介绍
Huttinger C40-0647 / D40-647.1 是一款工业级射频控制单元(RF Control Unit),在射频发电机、功率放大器及等离子系统中,承担着射频功率的精准控制、信号处理和状态监控的核心职责。作为工业射频和等离子设备中的核心控制组件,它通过高效的调控能力保障系统稳定性和工艺精度,广泛应用于半导体制造、PVD/CVD 薄膜工艺、等离子处理及科研实验等领域。
该射频控制单元的型号为 C40-0647 / D40-647.1,类型明确为射频控制单元(RF Control Unit),核心功能包括射频功率控制、信号处理、状态监控和模块管理,能够满足复杂工业环境下对射频系统高精度控制的需求。
在产品特点方面,高精度射频控制是其核心优势。它能够精确调节射频功率和波形,这种精准的控制能力是保证工艺稳定性和设备安全的关键。在半导体制造的等离子刻蚀工艺中,射频功率的微小偏差都可能导致刻蚀图案变形或深度不均,而该控制单元通过实时精准调控,确保射频参数始终稳定在预设范围内,从而保障半导体器件的生产质量和设备的安全运行。
快速响应能力使其在动态工艺中表现出色。能够实时处理控制信号,迅速响应系统的参数变化需求,这对于高精度工业和科研场景至关重要。例如,在 PVD 薄膜沉积工艺中,当等离子体状态出现瞬时波动时,控制单元可快速调整射频输出,避免波动对薄膜均匀性造成影响,确保沉积过程的稳定性。
工业级可靠性让该射频控制单元能够适应严苛的工业环境。它支持长期连续运行,可承受工业生产中高强度的工作负荷。同时,其具备的耐高温、抗振动及电磁干扰能力,使其在高温的生产车间、存在持续振动的设备集群或电磁环境复杂的科研实验室中,依然能保持稳定的性能,避免因环境因素导致的控制失误或模块故障,保障工艺的连续性。
完善保护功能为设备和工艺安全筑牢了防线。控制单元内置过流、过压、短路及过温保护,当系统出现电流过大、电压过高、电路短路或温度过高等异常情况时,能迅速启动保护措施,如切断射频输出或发出警报,防止异常情况对设备及整个系统造成损坏,降低了设备故障带来的损失和工艺中断的风险。
模块化设计使其在安装、替换和维护方面具有显著优势。这种设计不仅便于快速集成到不同的射频系统中,缩短安装周期,还能在需要维护或升级时,快速定位并更换相关部件,减少系统停机时间,提高设备的可用性。同时,它可与 Huttinger 系列射频和功率模块配套使用,增强了在不同系统中的兼容性和协同性。

英文资料:

Huttinger C40-0647/D40-647.1 RF Control Unit Introduction

Huttinger C40-0647/D40-647.1 is an industrial grade RF Control Unit that is responsible for precise control, signal processing, and status monitoring of RF power in RF generators, power amplifiers, and plasma systems. As a core control component in industrial RF and plasma equipment, it ensures system stability and process accuracy through efficient regulation capabilities, and is widely used in semiconductor manufacturing, PVD/CVD thin film processes, plasma treatment, and scientific research experiments.

The model of this RF control unit is C40-0647/D40-647.1, with a clear type of RF Control Unit. Its core functions include RF power control, signal processing, status monitoring, and module management, which can meet the high-precision control requirements of RF systems in complex industrial environments.

In terms of product features, high-precision RF control is its core advantage. It can accurately adjust RF power and waveform, and this precise control capability is key to ensuring process stability and equipment safety. In the plasma etching process of semiconductor manufacturing, even small deviations in RF power can cause deformation or uneven depth of etching patterns. However, this control unit ensures that RF parameters remain stable within the preset range through real-time and precise regulation, thereby guaranteeing the production quality of semiconductor devices and the safe operation of equipment.

The ability to respond quickly makes it perform well in dynamic processes. Being able to process control signals in real-time and respond quickly to system parameter changes is crucial for high-precision industrial and scientific research scenarios. For example, in the PVD thin film deposition process, when there are instantaneous fluctuations in the plasma state, the control unit can quickly adjust the RF output to avoid the impact of fluctuations on the uniformity of the thin film and ensure the stability of the deposition process.

Industrial grade reliability enables the RF control unit to adapt to harsh industrial environments. It supports long-term continuous operation and can withstand high-intensity workloads in industrial production. At the same time, its high temperature resistance, vibration resistance, and electromagnetic interference capabilities enable it to maintain stable performance in high-temperature production workshops, equipment clusters with continuous vibration, or research laboratories with complex electromagnetic environments, avoiding control errors or module failures caused by environmental factors and ensuring process continuity.

Improving protection functions has built a solid defense line for equipment and process safety. The control unit is equipped with overcurrent, overvoltage, short circuit, and over temperature protection. When the system experiences abnormal conditions such as excessive current, high voltage, circuit short circuit, or high temperature, protective measures can be quickly activated, such as cutting off RF output or issuing an alarm, to prevent damage to the equipment and the entire system caused by abnormal conditions, reducing the risk of equipment failure and process interruption.

 

 2.产      品      展      示      

c40-0647_d40-647_1_sds_huttinger_trumpf_pcb_card_0071723v00_1306_003_rf_controls.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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