AMAT 0090-10396射频滤波器箱

1.产 品 资 料 介 绍：

AMAT 0090-10396 射频滤波器箱

产品概述

AMAT（Applied Materials）0090-10396 射频滤波器箱是一种专用于半导体制造设备的电子模块，主要用于射频（RF）信号的滤波与调节。它可以抑制不必要的频率干扰，保证射频功率的纯净和稳定输出，从而提高等离子体源或射频驱动模块的性能。该模块通常应用于沉积、刻蚀等需要射频控制的工艺设备中。

技术参数（典型方向，具体数据需参考原厂资料）

• 滤波类型：射频信号带通/低通/高通滤波，降低噪声和干扰

• 工作频率范围：根据工艺要求的射频信号规格

• 接口：输入/输出射频信号端口，兼容 AMAT RF 控制模块

• 信号特性：低插入损耗、高隔离度，保证信号质量

• 环境适应性：高洁净度、低电磁干扰环境

• 结构：模块化设计，便于设备集成和维护

应用场景

1. 沉积工艺（PVD/CVD/ALD）

   • 对射频电源输出进行滤波，确保等离子体功率稳定

   • 提高薄膜沉积的均匀性和工艺重复性

2. 刻蚀工艺设备

   • 抑制射频信号中的杂散频率，避免对腔体等离子体产生干扰

   • 精确控制刻蚀速率和工艺轮廓

3. 等离子体源与射频驱动系统

   • 对射频信号进行净化和匹配，提高功率传输效率

   • 保证多模块射频同步和稳定性

4. 设备维护与升级

   • 可更换模块化滤波器箱，支持设备性能优化和信号调试

AMAT0090-10396射频滤波器箱  英文资料：

AMAT 0090-10396 RF Filter Box

Product Overview

AMAT (Applied Materials) 0090-10396 RF filter box is an electronic module specifically designed for semiconductor manufacturing equipment, mainly used for filtering and adjusting RF signals. It can suppress unnecessary frequency interference, ensure the purity and stable output of RF power, thereby improving the performance of plasma sources or RF drive modules. This module is typically used in process equipment that requires RF control, such as deposition and etching.

Technical parameters (typical direction, specific data should refer to the original factory information)

Filter type: RF signal bandpass/low-pass/high pass filtering, reducing noise and interference

Working frequency range: RF signal specifications according to process requirements

Interface: Input/output RF signal port, compatible with AMAT RF control module

Signal characteristics: low insertion loss, high isolation, ensuring signal quality

Environmental adaptability: high cleanliness, low electromagnetic interference environment

Structure: Modular design for easy integration and maintenance of equipment

Application scenarios

Deposition process (PVD/CVD/ALD)

Filter the RF power output to ensure stable plasma power

Improve the uniformity and process repeatability of thin film deposition

Etching process equipment

Suppress stray frequencies in RF signals to avoid interference with the cavity plasma

Accurate control of etching rate and process profile

Plasma source and RF drive system

Purification and matching of RF signals to improve power transmission efficiency

Ensure multi module RF synchronization and stability

Equipment maintenance and upgrade

Replaceable modular filter box, supporting equipment performance optimization and signal debugging

AMAT 0090-10396射频滤波器箱 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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