AMAT 0010-38838交流配电器

1.产 品 资 料 介 绍：

AMAT 0010-38838 交流配电器

产品概述

AMAT（Applied Materials）0010-38838 交流配电器是一种用于半导体制造设备的电力分配与管理模块。它主要负责将工业交流电源合理分配至设备内部各子模块，如控制器、加热器、泵浦、气动阀门和射频模块，确保各模块获得稳定、可靠的电源供应。交流配电器通常集成过载保护、短路保护及安全互锁接口，是设备电气系统的核心基础设施之一。

技术参数（典型方向，具体数据需参考原厂资料）

• 输入电源：工业标准 AC 电源

• 输出通道：多路交流电输出，适配各子模块需求

• 保护功能：过载保护、短路保护、过压保护

• 接口：与控制系统和互锁系统连接，实现远程监控与控制

• 安装方式：模块化安装，便于集成于控制箱或底盘

• 环境适应性：适应半导体设备洁净室和高功率工艺环境

应用场景

1. 沉积工艺（CVD/PVD/ALD）

   • 为加热器、泵浦、气体阀门、控制器等模块提供稳定电源

   • 保证沉积过程的工艺稳定性和设备安全

2. 刻蚀工艺设备

   • 分配电源给射频功率模块、传感器和气动组件

   • 支持刻蚀过程的精确控制和工艺重复性

3. 离子注入系统

   • 为离子源、扫描系统及束流监测模块供电

   • 确保注入剂量和能量的稳定性

4. 控制箱与底盘控制箱

   • 作为内部电源分配核心，提高设备电气系统可靠性

   • 集成互锁接口，实现过载、短路和安全保护

5. 工厂自动化与安全管理

   • 通过与上位系统连接，支持远程监控、报警及自动停机

   • 保障设备运行安全与工艺连续性

AMAT  0010-38838交流配电器 英文资料：

AMAT 0010-38838 AC Distributor

Product Overview

AMAT (Applied Materials) 0010-38838 AC distributor is a power distribution and management module used in semiconductor manufacturing equipment. It is mainly responsible for distributing industrial AC power to various sub modules within the equipment, such as controllers, heaters, pumps, pneumatic valves, and RF modules, to ensure stable and reliable power supply for each module. Communication power distribution equipment usually integrates overload protection, short circuit protection, and safety interlock interfaces, and is one of the core infrastructure of equipment electrical systems.

Technical parameters (typical direction, specific data should refer to the original factory information)

Input power supply: Industrial standard AC power supply

Output channel: Multiple AC power outputs, adapted to the requirements of each submodule

Protection functions: overload protection, short circuit protection, overvoltage protection

Interface: Connect with the control system and interlock system to achieve remote monitoring and control

Installation method: Modular installation, easy to integrate into the control box or chassis

Environmental adaptability: Suitable for semiconductor equipment cleanrooms and high-power process environments

Application scenarios

Deposition process (CVD/PVD/ALD)

Provide stable power supply for modules such as heaters, pumps, gas valves, controllers, etc

Ensure the process stability and equipment safety during sedimentation

Etching process equipment

Allocate power to RF power modules, sensors, and pneumatic components

Support precise control and process repeatability of etching process

Ion implantation system

Power supply for ion source, scanning system, and beam monitoring module

Ensure the stability of injected dose and energy

Control box and chassis control box

As the core of internal power distribution, improving the reliability of equipment electrical systems

Integrate interlocking interfaces to achieve overload, short circuit, and safety protection

Factory Automation and Safety Management

By connecting with the upper system, it supports remote monitoring, alarm and automatic shutdown

Ensure equipment operation safety and process continuity

AMAT 0010-38838交流配电器 产品展示      

 产品视频

3.其他产品

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4.其他英文产品

AB91-1 HESG437479R1 HESG437899 Control module
IT94-3 HESG440310R2 HESG112699B Control module
ICS TRIPLEX T8231 Control system module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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