AMAT AS00021-02漏水检测仪模块

1.产 品 资 料 介 绍：

AMAT AS00021-02 漏水检测仪模块

产品概述

AMAT（Applied Materials）AS00021-02 漏水检测仪模块是一种用于半导体制造设备的安全监测模块，主要用于检测设备内部或关键工艺区域的液体泄漏。它可以实时监控冷却液、工艺气体系统或其他流体管路，检测到异常液体存在时，触发报警或停机互锁信号，从而保护设备及工艺免受液体泄漏带来的损坏。

技术参数（典型方向，具体数据需参考原厂资料）

• 检测类型：液体泄漏检测

• 灵敏度：高灵敏度探头，可检测微量液体

• 输出信号：数字信号/报警信号，可与控制系统或互锁系统联动

• 接口：兼容 AMAT 控制系统和安全互锁逻辑

• 环境适应性：适应半导体设备洁净室及高湿度/温度环境

• 安装方式：模块化安装，便于设备内关键点布局

应用场景

1. 冷却系统监控

   • 检测冷却液管路泄漏，防止设备过热或电气模块损坏

2. 控制箱与底盘控制箱保护

   • 监测内部液体渗入或管路泄漏，避免电子模块受损

3. 沉积工艺（CVD/PVD/ALD）

   • 监控腔体冷却和辅助液体系统，保证工艺安全运行

4. 刻蚀与离子注入设备

   • 防止液体泄漏影响射频模块、泵浦或传感器，确保工艺稳定性

5. 工厂安全与维护

   • 与互锁系统联动，发现漏水立即报警或停机，保护操作人员和设备安全

AMAT  AS00021-02漏水检测仪模块 英文资料：

AMAT AS00021-02 Water Leakage Detector Module

Product Overview

The AMAT (Applied Materials) AS00021-02 leak detector module is a safety monitoring module used in semiconductor manufacturing equipment, mainly for detecting liquid leaks inside equipment or critical process areas. It can monitor coolant, process gas systems, or other fluid pipelines in real-time. When abnormal liquid is detected, it triggers an alarm or shutdown interlock signal to protect equipment and processes from damage caused by liquid leakage.

Technical parameters (typical direction, specific data should refer to the original factory information)

Detection type: Liquid leakage detection

Sensitivity: High sensitivity probe, capable of detecting trace liquids

Output signal: digital signal/alarm signal, can be linked with control system or interlock system

Interface: Compatible with AMAT control system and safety interlock logic

Environmental adaptability: Suitable for semiconductor equipment cleanrooms and high humidity/temperature environments

Installation method: Modular installation for easy layout of key points within the equipment

Application scenarios

Cooling system monitoring

Detect coolant pipeline leaks to prevent equipment overheating or electrical module damage

Control box and chassis control box protection

Monitor internal liquid infiltration or pipeline leakage to avoid damage to electronic modules

Deposition process (CVD/PVD/ALD)

Monitor the cooling and auxiliary liquid system of the monitoring chamber to ensure safe operation of the process

Etching and ion implantation equipment

Prevent liquid leakage from affecting RF modules, pumps, or sensors to ensure process stability

Factory Safety and Maintenance

Linked with the interlocking system, if water leakage is detected, an immediate alarm or shutdown will be triggered to protect the safety of operators and equipment

AMAT AS00021-02漏水检测仪模块 产品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218