AMAT  0100-01341电源模块

1.产 品 资 料 介 绍：

AMAT 0100-01341 电源模块

产品概述

AMAT（Applied Materials）0100-01341 电源模块是一种用于半导体制造设备的关键电气供能单元，用于为设备内部各功能模块提供稳定、可靠的直流或交流电源。它通常集成在控制箱、底盘控制箱或独立电源柜中，为加热器、泵浦、气动阀门、射频模块、控制器等关键子模块供电，确保设备稳定运行和工艺精度。

技术参数（典型方向，具体数据需参考原厂资料）

• 输入电源：工业标准 AC 电源

• 输出类型：直流/交流电源输出，多路可调

• 额定功率：满足高功率工艺模块需求

• 保护功能：过流、过压、短路保护

• 接口：与控制系统及互锁系统连接，实现远程监控

• 安装方式：模块化设计，便于集成、维护和更换

• 环境适应性：耐高温、耐振动，适应洁净室工艺环境

应用场景

1. 控制器与底盘控制箱供电

   • 提供稳定电源给控制器、PCB、互锁模块

   • 保证内部电子模块正常运行

2. 沉积工艺（CVD/PVD/ALD）

   • 为加热器、泵浦、气体阀门提供高精度电源

   • 支持薄膜沉积过程的温度和流量控制

3. 刻蚀工艺设备

   • 为射频模块、压力传感器、流量控制模块供电

   • 保证刻蚀功率和气体控制稳定

4. 离子注入系统

   • 提供离子源、扫描系统及束流监测模块的电力

   • 确保注入剂量和均匀性一致

5. 工厂自动化与安全系统

   • 与互锁及监控系统配合，实现设备异常断电保护

   • 提高操作安全性和工艺连续性

AMAT   0100-01341电源模块 英文资料：

AMAT 0100-01341 power module

Product Overview

The AMAT (Applied Materials) 0100-01341 power module is a critical electrical power supply unit used in semiconductor manufacturing equipment to provide stable and reliable DC or AC power to various functional modules inside the equipment. It is usually integrated into the control box, chassis control box, or independent power cabinet, providing power to key sub modules such as heaters, pumps, pneumatic valves, RF modules, controllers, etc., ensuring stable equipment operation and process accuracy.

Technical parameters (typical direction, specific data should refer to the original factory information)

Input power supply: Industrial standard AC power supply

Output type: DC/AC power output, multiple adjustable channels

Rated power: meets the requirements of high-power process modules

Protection function: overcurrent, overvoltage, short circuit protection

Interface: Connect with the control system and interlock system to achieve remote monitoring

Installation method: Modular design for easy integration, maintenance, and replacement

Environmental adaptability: high temperature resistance, vibration resistance, suitable for clean room process environment

Application scenarios

Controller and chassis control box power supply

Provide stable power supply to the controller PCB、 Interlocking module

Ensure the normal operation of internal electronic modules

Deposition process (CVD/PVD/ALD)

Provide high-precision power supply for heaters, pumps, and gas valves

Support temperature and flow control during thin film deposition process

Etching process equipment

Power supply for RF module, pressure sensor, and flow control module

Ensure stable etching power and gas control

Ion implantation system

Provide power for ion source, scanning system, and beam monitoring module

Ensure consistent injection dose and uniformity

Factory Automation and Safety Systems

Cooperate with interlocking and monitoring systems to achieve equipment abnormal power-off protection

Improve operational safety and process continuity

AMAT  0100-01341电源模块 产品展示      

 产品视频

3.其他产品

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500BIO01 1MRB150005R0001 1MRB200060-E 耦合器模块

4.其他英文产品

ICS TRIPLEX T8231 Control system module
1C31157G02 Input/output module
3BHB003688R0101 Power panel module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218