AMAT  0100-00025电源模块

1.产 品 资 料 介 绍：

AMAT 0100-00025 电源模块

产品概述

AMAT（Applied Materials）0100-00025 电源模块是一种用于半导体制造设备的核心电气供能单元，用于为设备内部各子模块提供稳定、可靠的直流或交流电源。它通常集成在控制箱、底盘控制箱或独立电源柜中，为加热器、泵浦、气动阀门、射频模块、控制器等关键模块供电，确保设备稳定运行、工艺精度和系统安全。

技术参数（典型方向，具体数据需参考原厂资料）

• 输入电源：工业标准 AC 电源

• 输出类型：直流/交流电源输出，多路可调

• 额定功率：适用于高功率工艺模块

• 保护功能：过流保护、过压保护、短路保护

• 接口：可与设备控制系统和安全互锁系统连接，实现远程监控

• 安装方式：模块化，便于集成、维护和现场更换

• 环境适应性：耐高温、耐振动，适应洁净室工艺环境

应用场景

1. 控制器与底盘控制箱供电

   • 为控制器、PCB、互锁模块等提供稳定电源

   • 保证内部电子模块正常运行

2. 沉积工艺（CVD/PVD/ALD）

   • 为加热器、泵浦、气体阀门提供高精度电源

   • 支持薄膜沉积过程的温度和流量控制

3. 刻蚀工艺设备

   • 为射频模块、压力传感器、流量控制模块供电

   • 保证刻蚀功率和气体控制稳定

4. 离子注入系统

   • 提供离子源、扫描系统及束流监测模块的电力

   • 确保注入剂量和均匀性一致

5. 工厂自动化与安全系统

   • 与互锁及监控系统配合，实现设备异常断电保护

   • 提高操作安全性和工艺连续性

AMAT  0100-00025电源模块 英文资料：

AMAT 0100-00025 power module

Product Overview

AMAT (Applied Materials) 0100-00025 power module is a core electrical power supply unit used in semiconductor manufacturing equipment to provide stable and reliable DC or AC power to various sub modules inside the equipment. It is usually integrated into control boxes, chassis control boxes, or independent power cabinets to supply power to key modules such as heaters, pumps, pneumatic valves, RF modules, controllers, etc., ensuring stable equipment operation, process accuracy, and system safety.

Technical parameters (typical direction, specific data should refer to the original factory information)

Input power supply: Industrial standard AC power supply

Output type: DC/AC power output, multiple adjustable channels

Rated power: suitable for high-power process modules

Protection functions: overcurrent protection, overvoltage protection, short circuit protection

Interface: Can connect with device control system and security interlock system to achieve remote monitoring

Installation method: Modular, easy to integrate, maintain, and ｒｅｐｌａｃｅ on site

Environmental adaptability: high temperature resistance, vibration resistance, suitable for clean room process environment

Application scenarios

Controller and chassis control box power supply

For the controller PCB、 Interlocking modules and other components provide stable power supply

Ensure the normal operation of internal electronic modules

Deposition process (CVD/PVD/ALD)

Provide high-precision power supply for heaters, pumps, and gas valves

Support temperature and flow control during thin film deposition process

Etching process equipment

Power supply for RF module, pressure sensor, and flow control module

Ensure stable etching power and gas control

Ion implantation system

Provide power for ion source, scanning system, and beam monitoring module

Ensure consistent injection dose and uniformity

Factory Automation and Safety Systems

Cooperate with interlocking and monitoring systems to achieve equipment abnormal power-off protection

Improve operational safety and process continuity

AMAT 0100-00025电源模块  产品展示      

 产品视频

3.其他产品

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500BIO01 1MRB150005R1-J 控制模块
500BOM01 1MRB150023R0002 控制卡

4.其他英文产品

3BHB003688R0101 Power panel module
ESTIC TNA1-TU01-SH motor
DSMB-01C 3AFE64691929 power supply board

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218