AMAT 0010-70415气动箱

1.产 品 资 料 介 绍：

AMAT 0010-70415 气动箱

产品概述

AMAT（Applied Materials）0010-70415 气动箱是一种用于半导体制造设备的 气动控制与分配单元。它集成了气动阀门、管路接口、调压器和执行元件，用于为设备内部各子模块（如气动互锁、气动阀门、泵浦和机械动作部件）提供稳定的压缩气体供应和控制。气动箱确保设备气动系统安全可靠地运行，同时支持工艺操作、维护和自动化控制。

技术参数（典型方向，具体数据需参考原厂资料）

• 气源类型：压缩空气或惰性气体

• 控制方式：气动或电控气动阀驱动

• 接口：多路气体输出接口，可连接气动执行模块

• 内部组件：气动阀、调压器、过滤器、传感器接口

• 安装方式：模块化设计，可集成于设备底盘或控制箱

• 环境适应性：耐高压、耐振动，适应洁净室及工业环境

应用场景

1. 沉积工艺（CVD/PVD/ALD）

   • 提供反应腔体或工艺模块所需气动操作

   • 支持气体阀门精确控制和腔体压力调节

2. 刻蚀工艺设备

   • 控制气动阀门和腔体开关动作

   • 保证刻蚀工艺参数稳定

3. 互锁系统与安全控制

   • 配合互锁模块，实现门锁、阀门安全控制

   • 防止设备在不安全状态下操作

4. 控制箱与底盘系统

   • 作为气动系统的核心分配单元

   • 为各子模块提供稳定的气动驱动

5. 工厂自动化与维护

   • 支持远程气动控制、设备状态监控

   • 提高设备操作安全性和维护效率

AMAT  0010-70415气动箱 英文资料：

AMAT 0010-70415 Pneumatic Box

Product Overview

AMAT (Applied Materials) 0010-70415 pneumatic box is a pneumatic control and distribution unit used in semiconductor manufacturing equipment. It integrates pneumatic valves, pipeline interfaces, regulators, and actuators to provide stable compressed gas supply and control for various sub modules within the equipment, such as pneumatic interlocks, pneumatic valves, pumps, and mechanical action components. The pneumatic box ensures the safe and reliable operation of the equipment's pneumatic system, while supporting process operation, maintenance, and automation control.

Technical parameters (typical direction, specific data should refer to the original factory information)

Gas source type: Compressed air or inert gas

Control mode: Pneumatic or electrically controlled pneumatic valve drive

Interface: Multi channel gas output interface, capable of connecting pneumatic execution modules

Internal components: pneumatic valve, regulator, filter, sensor interface

Installation method: Modular design, can be integrated into the equipment chassis or control box

Environmental adaptability: resistant to high pressure and vibration, suitable for clean rooms and industrial environments

Application scenarios

Deposition process (CVD/PVD/ALD)

Provide pneumatic operations required for reaction chambers or process modules

Support precise control of gas valves and chamber pressure regulation

Etching process equipment

Control the action of pneumatic valves and chamber switches

Ensure stable etching process parameters

Interlocking system and safety control

Cooperate with the interlock module to achieve safe control of door locks and valves

Prevent equipment from operating in an unsafe state

Control box and chassis system

As the core allocation unit of the pneumatic system

Provide stable pneumatic drive for each submodule

Factory Automation and Maintenance

Support remote pneumatic control and equipment status monitoring

Improve equipment operation safety and maintenance efficiency

AMAT  0010-70415气动箱 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218