AMAT  0010-20498电源供应模块

1.产 品 资 料 介 绍：

AMAT 0010-20498 电源供应模块

产品概述

AMAT（Applied Materials）0010-20498 电源供应模块是一种用于半导体制造设备的 关键电力供应单元。它负责为设备内部的控制器、加热器、泵浦、气动阀门、射频模块、传感器及其他子模块提供稳定、高可靠的电源，保证设备持续、精确运行。该模块通常安装于控制箱或底盘，是设备正常运行和工艺稳定的核心组成部分。

技术参数（典型方向，具体数据需参考原厂资料）

• 输入电源：工业标准交流电

• 输出类型：直流或交流多路输出，可调

• 额定功率：适配高功率工艺模块使用

• 保护功能：过流保护、过压保护、短路保护

• 接口类型：与设备控制系统、互锁模块及下游模块连接

• 安装方式：模块化设计，便于安装、维护和现场更换

• 环境适应性：耐高温、耐振动，适应半导体设备洁净室环境

应用场景

1. 控制器与底盘控制箱供电

   • 为控制器、PCB、互锁模块及其他电子模块提供稳定电源

   • 保证设备核心控制系统正常运行

2. 沉积工艺（CVD/PVD/ALD）

   • 为加热器、泵浦、气体阀门提供高精度电源

   • 支持薄膜沉积工艺的温度和流量控制

3. 刻蚀工艺设备

   • 为射频模块、压力传感器及流量控制模块供电

   • 确保刻蚀功率及气体控制稳定

4. 离子注入系统

   • 为离子源、扫描系统及束流监测模块提供电力

   • 确保注入剂量和均匀性

5. 工厂自动化与安全系统

   • 与互锁及监控系统联动，实现设备异常断电保护

   • 提高操作安全性与工艺连续性

AMAT   0010-20498电源供应模块 英文资料：

AMAT 0010-20498 Power Supply Module

Product Overview

AMAT (Applied Materials) 0010-20498 power supply module is a critical power supply unit used in semiconductor manufacturing equipment. It is responsible for providing stable and highly reliable power to the internal controllers, heaters, pumps, pneumatic valves, RF modules, sensors, and other sub modules of the equipment, ensuring continuous and precise operation of the equipment. This module is usually installed in the control box or chassis and is a core component for the normal operation and process stability of the equipment.

Technical parameters (typical direction, specific data should refer to the original factory information)

Input power supply: Industrial standard AC power

Output type: DC or AC multi-channel output, adjustable

Rated power: Suitable for use with high-power process modules

Protection functions: overcurrent protection, overvoltage protection, short circuit protection

Interface type: Connected to device control system, interlock module, and downstream module

Installation method: Modular design for easy installation, maintenance, and on-site replacement

Environmental adaptability: high temperature resistance, vibration resistance, suitable for semiconductor equipment cleanroom environment

Application scenarios

Controller and chassis control box power supply

For the controller PCB、 Interlocking modules and other electronic modules provide stable power supply

Ensure the normal operation of the core control system of the equipment

Deposition process (CVD/PVD/ALD)

Provide high-precision power supply for heaters, pumps, and gas valves

Temperature and flow control supporting thin film deposition process

Etching process equipment

Power supply for RF module, pressure sensor, and flow control module

Ensure stable etching power and gas control

Ion implantation system

Provide power for ion source, scanning system, and beam monitoring module

Ensure injection dose and uniformity

Factory Automation and Safety Systems

Linkage with interlocking and monitoring systems to achieve equipment abnormal power-off protection

Improve operational safety and process continuity

AMAT   0010-20498电源供应模块 产品展示      

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1407-CGCMC module
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218