AMAT  3930-01083控制器

1.产 品 资 料 介 绍：

AMAT 3930-01083 控制器

产品概述

AMAT（Applied Materials）3930-01083 控制器是一种用于半导体制造设备的 核心电子控制单元。它负责设备各子模块（如加热器、泵浦、气动阀门、射频模块、传感器等）的协调运行与工艺控制，实现工艺参数的精确调节和设备状态的监控。该控制器通常集成在控制箱或底盘中，是设备自动化运行和工艺稳定性的关键模块。

技术参数（典型方向，具体数据需参考原厂资料）

• 处理能力：支持多路模块并行控制

• 接口类型：数字/模拟输入输出接口，兼容 AMAT 各类子模块

• 通信能力：支持与上位控制系统及互锁模块的数据通信

• 控制功能：逻辑运算、工艺调节、状态监控

• 安装方式：模块化设计，可集成于控制箱或底盘

• 环境适应性：适应半导体设备洁净室及工业温度环境

应用场景

1. 沉积工艺（CVD/PVD/ALD）

   • 控制加热器温度、气体流量和泵浦压力

   • 保证薄膜沉积均匀性和工艺重复性

2. 刻蚀工艺设备

   • 控制射频功率模块、刻蚀气体流量及腔体压力

   • 提高刻蚀精度和工艺稳定性

3. 离子注入系统

   • 控制离子源、扫描系统及束流监测模块

   • 确保注入剂量和均匀性

4. 控制箱与底盘控制箱

   • 作为设备内部各模块的核心控制单元

   • 与电源模块、互锁模块、PCB等配合实现设备安全可靠运行

5. 工厂自动化与远程监控

   • 与上位系统和互锁系统联动，实现设备状态监控、数据采集和异常报警

AMAT 3930-01083控制器 英文资料：

AMAT 3930-01083 Controller

Product Overview

The AMAT (Applied Materials) 3930-01083 controller is a core electronic control unit used in semiconductor manufacturing equipment. It is responsible for the coordinated operation and process control of various sub modules of the equipment (such as heaters, pumps, pneumatic valves, RF modules, sensors, etc.), achieving precise adjustment of process parameters and monitoring of equipment status. This controller is usually integrated into the control box or chassis and is a key module for equipment automation operation and process stability.

Technical parameters (typical direction, specific data should refer to the original factory information)

Processing capability: Supports parallel control of multiple modules

Interface type: digital/analog input/output interface, compatible with various sub modules of AMAT

Communication capability: Supports data communication with the upper control system and interlock module

Control functions: logic operation, process adjustment, status monitoring

Installation method: Modular design, can be integrated into the control box or chassis

Environmental adaptability: Suitable for semiconductor equipment cleanrooms and industrial temperature environments

Application scenarios

Deposition process (CVD/PVD/ALD)

Control heater temperature, gas flow rate, and pump pressure

Ensure the uniformity of thin film deposition and process repeatability

Etching process equipment

Control RF power module, etching gas flow rate, and chamber pressure

Improve etching accuracy and process stability

Ion implantation system

Control ion source, scanning system, and beam monitoring module

Ensure injection dose and uniformity

Control box and chassis control box

As the core control unit of each module inside the device

Cooperate with power modules, interlock modules, PCBs, etc. to achieve safe and reliable operation of equipment

Factory Automation and Remote Monitoring

Linkage with the upper system and interlocking system to achieve equipment status monitoring, data collection, and abnormal alarm

AMAT 3930-01083控制器 产品展示      

 产品视频

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4.其他英文产品

PFEA112-20 3BSE050091R20 controller
UFC762AE101 3BHE006412R0101 Control the mainboard
B&R 8V1090.00-2 Servo module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218