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AMAT Applied Materials 0050-30838焊接阀组

发布时间:2025-09-24人气:
  • AMAT Applied Materials 0050-30838焊接阀组
  • AMAT Applied Materials 0050-30838焊接阀组
  • AMAT Applied Materials 0050-30838焊接阀组

AMAT Applied Materials 0050-30838焊接阀组

1.产 品 资 料 介 绍:

Applied Materials 0050-30838 焊接阀组是一款专为半导体制造设备设计的高纯度、耐腐蚀气体分配组件,用于精确控制工艺气体的输送与切换,确保制程稳定性与重复性。

核心规格

项目规格
品牌 / 型号Applied Materials 0050-30838
适用介质工艺气体(如 N₂、Ar、O₂、CF₄、SF₆ 等)
接口类型VCR 或 Swagelok 卡套接头,1/4"、3/8" 或 1/2"(依机型)
材质主体:316L 不锈钢;密封:Vespel、PTFE、UHP 级橡胶
工作压力0~200 psi(部分可达 300 psi)
工作温度-20~150℃
洁净等级SEMI S2/S8 标准,适用于高真空与超净环境
功能多通道气体切换、流量调节、压力隔离
安装方式面板式或集成于气体柜

产品特点

  • 高纯度设计:全不锈钢结构配合 UHP 密封材料,有效避免气体污染。
  • 耐腐蚀性能:适用于强腐蚀性气体环境,确保长期稳定运行。
  • 高精度控制:内置精密调节阀,可实现 ppm 级流量控制。
  • 模块化结构:支持在线更换,维护便捷,可根据工艺需求灵活扩展通道数。
  • 高可靠性:通过严格的压力与泄漏测试,满足 24×7 连续运行要求。

典型应用

  • 半导体刻蚀与沉积设备的气体分配
  • 离子注入机的工艺气体切换
  • 晶圆清洗设备的化学品输送控制
  • 太阳能电池制造的薄膜沉积工艺

AMAT Applied Materials  0050-30838焊接阀组 英文资料:

Applied Materials 0050-30838 welding valve assembly is a high-purity, corrosion-resistant gas distribution component designed specifically for semiconductor manufacturing equipment, used for precise control of process gas delivery and switching, ensuring process stability and repeatability.

Core specifications

Project specifications

Brand/Model Applied Materials 0050-30838

Applicable medium process gases (such as N ₂, Ar, O ₂, CF ₄, SF ₆, etc.)

Interface type VCR or Swagelok card sleeve connector, 1/4 ", 3/8" or 1/2 "(depending on the model)

Material body: 316L stainless steel; Sealing: Vespel, PTFE, UHP grade rubber

Working pressure: 0-200 psi (some can reach up to 300 psi)

Working temperature -20~150 ℃

Cleanliness level SEMI S2/S8 standard, suitable for high vacuum and ultra clean environments

Multi channel gas switching, flow regulation, pressure isolation

Installation method: panel type or integrated into gas cabinet

Product Features

High purity design: The all stainless steel structure combined with UHP sealing material effectively avoids gas pollution.

Corrosion resistance: Suitable for highly corrosive gas environments, ensuring long-term stable operation.

High precision control: Equipped with a precision regulating valve, it can achieve ppm level flow control.

Modular structure: supports online replacement, easy maintenance, and can flexibly expand the number of channels according to process requirements.

High reliability: Through rigorous pressure and leakage testing, it meets the requirements of 24 × 7 continuous operation.

Typical Applications

Gas distribution in semiconductor etching and deposition equipment

Process gas switching of ion implantation machine

Chemical transportation control of wafer cleaning equipment

Thin film deposition process for solar cell manufacturing

AMAT Applied Materials  0050-30838焊接阀组 产品展示      

0050-30838_weldment_valve_manifold_3_station_leftge_applied_materials_amat.jpg

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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