AMAT Applied Materials 0100-90886伺服控制模块
1.产 品 资 料 介 绍：
AMAT Applied Materials 0100-90886 伺服控制模块
核心规格
性能特点
典型应用
AMAT Applied Materials 0100-90886伺服控制模块 英文资料：
AMAT Applied Materials 0100-90886 Servo Control Module
0100-90886 is a high-precision servo control module launched by Applied Materials, designed specifically for precision motion control in semiconductor manufacturing equipment, widely used in platforms such as Centura, Endura, P5000, etc.
Core specifications
Project specification remarks
Suitable for platforms such as Centura, Endura, P5000, Producer, etc. to adapt to multi chamber wafer manufacturing systems
Control axis number 1-4 (can be cascaded and expanded) supports stepper/servo motors
High precision PID control with three control modes: position, speed, and torque
Communication interfaces RS-485, EtherNet/IP, SECS/GEM support factory automation integration
Encoder interface incremental/absolute encoder supports high-resolution feedback
Input voltage 24VDC control power supply motor power supply needs to be provided additionally
Working temperature 0-40 ° C, it is recommended to use forced air cooling
Size standard 3U rack mounted for easy system integration
Installation inside control cabinet with protection level IP20
Performance Characteristics
High precision positioning: Supports nanometer level resolution to meet the precise positioning requirements of wafer manufacturing equipment
Multi axis synchronous control: The synchronization error between each axis is less than 1 microsecond, ensuring the accuracy of wafer transfer and processing
High speed response: 1MHz control cycle, fast response to process changes
Safety design: equipped with multiple protection functions such as overcurrent, overvoltage, overheating, and position exceeding limits
Easy to integrate: standard interfaces and open protocols for easy integration with existing control systems
Typical Applications
Control of wafer transfer robotic arm
Chamber door switch and positioning system
Process gas nozzle position control
Precision worktable driver
Vacuum valve control
AMAT Applied Materials 0100-90886伺服控制模块 产品展示
产品视频
3.其他产品
Alcatel-Lucent 53LI1A3AXX控制板
Alcatel-Lucent 3DH03131AAAG控制板
Alcatel-Lucent 3FE66721AB VAI2AK7NAA端口板
4.其他英文产品
ABB SLMG99 Switch input module
ABB YT213001-BB YTE102B Switch output module
ABB YT213001-BC YTE102C Thermocouple output module
| R65GMNA-TS-NS-NV-00 | CACR-SR30SB1BF-Y45 | CEQM67-2515-0 |
| R65GMNA-TS-LG-NV-00 | GESPAC GESMDC-1 9520 | 330106-05-30-10-02-00 |
| R65GMNA-R2-NS-NV-00 | CACR-SR03SZ1SSY106 | RB1G03-0-0 |
| R65GENA-TS-SS-NV-02 | CACR-HR20BB | 061-03328-0022 |
| R65GENA-TS-NS-NV-00 | CACR-SR12TZ6SM | 110550 |
| R65GENA-R2-NS-VS-00 | CACR-SR03AB1ER | 60-0260-00 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
