AMAT Applied Materials 0120-90146量规控制器模块
1.产 品 资 料 介 绍：
AMAT Applied Materials 0120-90146 量规控制器模块
核心规格
功能特点
典型应用
安装与维护要点
AMAT Applied Materials 0120-90146量规控制器模块 英文资料：
AMAT Applied Materials 0120-90146 Gauge Controller Module
AMAT 0120-90146 is a high-precision gauge controller module designed specifically for semiconductor manufacturing equipment, used for online monitoring and control of various process parameters. It can collect sensor data in real-time and adjust process conditions through closed-loop control to ensure wafer processing quality.
Core specifications
Project specification remarks
Compatible with various AMAT devices such as Centura, Endura, Reflexion, P5000, etc
Input signal 0-10 V, 4-20 mA, digital encoder signal supports multiple sensor types
Output control 0-10 V, 4-20 mA, PWM signal, flexible relay contact control mode
Communication interfaces RS-485/RS-232, Ethernet, SECS/GEM facilitate factory automation integration
Sampling frequency up to 10 kHz can be configured according to requirements
Measurement accuracy ± 0.1% High precision measurement and control
Working temperature 0-50 ℃, it is recommended to use forced air cooling
Dual redundant 24 VDC power supply improves system reliability
The standard external dimensions are 19 "2U rack mounted for easy system integration
Features
High precision measurement and control: using advanced signal processing technology to ensure accurate and reliable measurement data
Multi channel parallel processing: can simultaneously connect multiple sensors to achieve synchronous monitoring of multiple parameters
Real time data processing: high-speed sampling and processing capabilities, timely response to process changes
Flexible control strategy: supports multiple algorithms such as PID control and adaptive control
Comprehensive fault diagnosis: equipped with channel fault detection and alarm functions
Historical data storage: Built in data storage function for easy process traceability and analysis
Typical Applications
Film thickness monitoring and control during etching process
Monitoring of Chemical Vapor Deposition (CVD) Process Parameters
Surface profile measurement of chemical mechanical polishing (CMP)
Monitoring of ion implantation dose uniformity
Status monitoring and data collection of various process equipment
Key points for installation and maintenance
Installation precautions:
Ensure good grounding and reduce electromagnetic interference
Separate the wiring of analog signal lines and power lines
Reserve sufficient heat dissipation space
Debugging suggestions:
Perform single point calibration first to ensure the accuracy of each channel
Gradually increase measurement points to verify system stability
Optimize control parameters to achieve optimal control effects
Maintenance cycle:
Regularly check for loose connections
Clean the dust inside the equipment
Regularly backup configuration parameters and historical data
AMAT Applied Materials 0120-90146量规控制器模块 产品展示
产品视频
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| R65GMNA-R2-NS-NV-00 | CACR-SR03SZ1SSY106 | RB1G03-0-0 |
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
