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AMAT Applied Materials 0090-90140控制器模块

发布时间:2025-09-26人气:
  • AMAT Applied Materials 0090-90140控制器模块
  • AMAT Applied Materials 0090-90140控制器模块
  • AMAT Applied Materials 0090-90140控制器模块

AMAT Applied Materials 0090-90140控制器模块

1.产 品 资 料 介 绍:

AMAT Applied Materials 0090-90140 控制器模块

AMAT 0090-90140 是一款高性能工业控制器模块,专为半导体制造设备设计,用于实现多通道信号采集、实时控制与设备协调管理,适配 Centura、Endura、P5000 等平台。

核心规格

项目规格备注
适用平台Centura、Endura、P5000、Producer 等多腔室晶圆制造系统
控制通道多通道模拟 / 数字混合控制可扩展 I/O 模块
输入信号0–10V、4–20mA、热电偶、RTD、数字量高分辨率 ADC
输出控制0–10V、4–20mA、PWM、继电器触点电气隔离设计
通信接口RS-485、以太网、SECS/GEM支持工厂自动化集成
处理器高性能嵌入式 CPU实时操作系统
工作温度0℃~50℃建议强制风冷
电源24VDC(双冗余可选)提高系统可靠性
外形尺寸标准机架式或板卡式适配 AMAT 标准机箱

功能特点

  • 高精度控制:采用先进的 PID / 自适应控制算法,确保温度、压力、流量等参数的精确控制
  • 多任务并行处理:可同时管理多个控制回路,保证工艺同步性
  • 模块化扩展:支持 I/O 扩展模块,可根据需求灵活配置系统规模
  • 完善的诊断功能:具备通道故障检测、通讯诊断和报警记录功能
  • 高可靠性:工业级设计,适应半导体制造环境的长时间稳定运行
  • 易于集成:支持标准工业通信协议,方便与设备和工厂系统对接

典型应用

  • 工艺气体流量控制与监测
  • 腔室温度与压力闭环控制
  • 真空系统监控与调节
  • 晶圆传输系统协调控制
  • 设备状态监测与数据采集

AMAT Applied Materials 0090-90140控制器模块 英文资料:

AMAT Applied Materials 0090-90140 Controller Module

AMAT 0090-90140 is a high-performance industrial controller module designed specifically for semiconductor manufacturing equipment. It is used to achieve multi-channel signal acquisition, real-time control, and device coordination management, and is compatible with platforms such as Centura, Endura, P5000, etc.

Core specifications

Project specification remarks

Suitable for multi chamber wafer manufacturing systems such as Centura, Endura, P5000, Producer, etc

Control channel multi-channel analog/digital hybrid control expandable I/O module

Input signal 0-10V, 4-20mA, thermocouple RTD、 Digital high-resolution ADC

Output control 0-10V, 4-20mA, PWM, relay contact electrical isolation design

Communication interfaces RS-485, Ethernet, SECS/GEM support factory automation integration

High performance embedded CPU real-time operating system with processor

It is recommended to use forced air cooling for working temperatures between 0 ℃ and 50 ℃

Power supply 24VDC (dual redundancy optional) to improve system reliability

External dimensions standard rack mounted or card mounted adapter AMAT standard chassis

Features

High precision control: using advanced PID/adaptive control algorithms to ensure precise control of parameters such as temperature, pressure, and flow rate

Multi task parallel processing: can manage multiple control loops simultaneously, ensuring process synchronization

Modular Expansion: Supports I/O expansion modules and can flexibly configure system scale according to requirements

Complete diagnostic function: equipped with channel fault detection, communication diagnosis, and alarm recording functions

High reliability: Industrial grade design, suitable for long-term stable operation in semiconductor manufacturing environments

Easy to integrate: Supports standard industrial communication protocols for easy integration with devices and factory systems

Typical Applications

Process gas flow control and monitoring

Closed loop control of chamber temperature and pressure

Vacuum system monitoring and regulation

Coordination and control of wafer transfer system

Equipment status monitoring and data collection

AMAT Applied Materials 0090-90140控制器模块 产品展示      

0090-90140_0090-90131_vacuum_manual_control_target_system_applied_materials_4 (1).jpg

 产品视频

3.其他产品

AMAT 0090-76133单板计算机
AMAT 0190-75084视频控制器
AMAT 0190-00318控制器模块

4.其他英文产品

AMAT 0100-20458 Multifunctional I/O module
AMAT 0100-20313 Serial control module
AMAT 0100-09153 Transfer switch module

IC3600SGDD16DD1682-0CE4IC3600SSVG1
IC3600SGDA16DD1682-0CE3IC3600SSVF1B
IC3600SFVA16DD1682-0CD0IC3600SSVF1
IC3600SFUC1B6DD1682-0CC0IC3600SSVE1
IC3600SFUC16DD1682-0BE0IC3600SSVD1J1B
IC3600SFUB16DD1682-0BC4IC3600SSVD1H
IC3600SFUA1C6DD1682-0BC3IC3600SSVD1
IC3600SFUA16DD1682-0BC0IC3600SSVB1B

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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