AMAT Applied Materials 0010-99060气体面板
1.产 品 资 料 介 绍：
- 多气体通道集成管控：采用模块化设计，集成至少 6-8 路独立气体通道，可同时管控不同类型的工艺气体（如刻蚀工艺中的 CF₄、O₂，沉积工艺中的 SiH₄、NH₃）。每路通道均配备独立的截止阀、过滤器与压力调节单元，支持气体种类灵活切换，满足多工艺步骤的气体供应需求，通道间隔离度高，可有效防止气体交叉污染。
- 高精度压力与流量控制：搭载进口高精度压力 regulators（如 Swagelok、Parker 品牌），压力调节范围覆盖 0.1-10bar，调节精度 ±0.5% FS（满量程），可将输入气体压力稳定在工艺所需的精准范围，避免压力波动影响工艺稳定性；同时每路通道可兼容 Mass Flow Controller（MFC，质量流量控制器），支持流量范围 0-500sccm（标准毫升 / 分钟），流量控制精度 ±1% FS，实现对气体流量的实时精准调控。
- 多层级气体净化过滤：每路气体通道依次配备三级过滤单元，第一级为 5μm 粗过滤器，过滤气体中的大颗粒杂质；第二级为 0.1μm 精密过滤器，去除微小颗粒；第三级为化学吸附过滤器，可吸附气体中的水分（露点≤-80℃）、氧气（含量≤1ppb）及有机杂质，确保输出气体纯度达到 99.9999%（6N 级）以上，满足半导体先进制程（如 7nm 及以下）对气体洁净度的要求。
- 全方位安全防护设计：具备多重安全保护功能，包括过压保护（当气体压力超过设定阈值 1.2 倍时，自动开启泄压阀）、泄漏检测（集成高精度气体泄漏传感器，检测精度≤1×10⁻⁹mbar・L/s，泄漏时立即关闭对应通道截止阀并触发报警）、紧急切断（配备紧急切断按钮，发生紧急情况时可一键切断所有气体供应）；同时面板外壳采用耐腐蚀不锈钢材质（316L），具备良好的抗化学腐蚀性能，适应半导体车间的化学环境。
- 智能化监控与集成：配备高清 LCD 显示屏，可实时显示每路气体的压力、流量、过滤状态等参数；支持 RS-485/EtherNet 通信接口，可无缝接入 AMAT 主设备控制系统（如 Centura、Producer 系列）及工厂 MES 系统，实现气体供应参数的远程监控、数据记录与历史追溯；同时具备故障自诊断功能，可自动识别过滤器堵塞、阀门故障等问题，并通过声光报警提示，便于及时维护。
AMAT Applied Materials 0010-99060气体面板 英文资料：
1、 Core positioning and system of the product
The 0010-99060 gas panel is a core control component in the semiconductor equipment process gas supply system of Applied Materials Company (AMAT), belonging to the "high-precision gas delivery and control" product line. In the semiconductor manufacturing process, the purity, flow rate, pressure and other parameters of process gases directly affect the quality of chip manufacturing. As a "process gas manager", this gas panel is mainly suitable for key process equipment such as wafer etching, thin film deposition (CVD/PVD), ion implantation, etc. By centrally filtering, stabilizing, regulating and safely controlling various process gases (such as reaction gases, carrier gases, cleaning gases), it provides stable, clean and accurate gas supply for equipment, which is a key link to ensure the stability of semiconductor processes and chip yield.
2、 Analysis of core functions and technical characteristics
Based on the strict requirements of semiconductor technology for gas supply and the application scenarios of this gas panel, its core functions and technical characteristics can be broken down in detail into the following points:
Multi gas channel integrated control: adopting modular design, integrating at least 6-8 independent gas channels, which can simultaneously control different types of process gases (such as CF ₄, O ₂ in etching process, SiH ₄, NH ∝ in deposition process). Each channel is equipped with independent shut-off valves, filters, and pressure regulating units, supporting flexible switching of gas types to meet the gas supply needs of multiple process steps. The isolation between channels is high, which can effectively prevent gas cross contamination.
High precision pressure and flow control: Equipped with imported high-precision pressure regulators (such as Swagelok and Parker brands), the pressure regulation range covers 0.1-10 bar, with a regulation accuracy of ± 0.5% FS (full range), which can stabilize the input gas pressure within the precise range required by the process and avoid pressure fluctuations affecting process stability; At the same time, each channel is compatible with Mass Flow Controller (MFC), supporting a flow range of 0-500 sccm (standard milliliters/minute) and a flow control accuracy of ± 1% FS, achieving real-time and precise control of gas flow.
Multi level gas purification and filtration: Each gas channel is equipped with a three-stage filtration unit, with the first stage being a 5 μ m coarse filter to filter out large particle impurities in the gas; The second level is a 0.1 μ m precision filter that removes small particles; The third level is a chemical adsorption filter that can adsorb moisture (dew point ≤ -80 ℃), oxygen (content ≤ 1ppb), and organic impurities in the gas, ensuring that the output gas purity reaches 99.9999% (6N level) or above, meeting the requirements of advanced semiconductor processes (such as 7nm and below) for gas cleanliness.
AMAT Applied Materials 0010-99060气体面板 产品展示
产品视频
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DSSB140 48980001-P Logic control card
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GRBTU 3BSE013175R1 base module
| 6ES5477-8EC11 | CACR-SR15BE13S | 5341852 |
| 6ES5470-7LC13 | CACR-SR06TZ9SMY02A | 3BHB005171R0101 |
| 6ES5470-7LC12 | CACR-PR30BC3AFY | 3HAB8101-19 DSQC545A |
| 6ES5470-7LB13 | CACR-SR05BB1BF | 6SC6101-2B-Z |
| 6ES5470-7LB12 | CONTROLLER | TSX3721101 |
| 6ES5470-7LA13 | CACR-SR03SB1AF | TSX07301012 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
