AMAT Applied Materials 0100-90708真空控制联锁 PCB 卡
1.产 品 资 料 介 绍：
- 多源真空信号集成管控：搭载 12 路高精度模拟 / 数字输入通道，可同步采集皮拉尼真空规（粗真空监测）、电容薄膜真空规（高真空监测）的压力信号（测量范围覆盖 10⁵~10⁻⁷Pa），以及隔离阀、钟摆阀的开关状态信号，信号采样频率≥1kHz，响应延迟≤5ms，实现真空参数的毫秒级感知。
- 智能联锁逻辑执行：内置基于 SIL 2 安全等级的可编程控制器，预设真空系统专属联锁逻辑 —— 当检测到工艺腔真空度未达 10⁻³Pa（工艺启动阈值）时，自动锁定射频电源与气体进气阀；若发生腔体突发泄漏（压力骤升≥10Pa/s），可在 100ms 内触发三重保护：关闭分子泵电源、开启前级隔离阀、启动氮气破空回路，防止空气涌入污染腔体。
- 真空阀门精准驱动：集成 8 路大功率继电器输出模块，可直接驱动闸阀、角阀、钟摆阀等各类真空阀门（支持 DC 24V/AC 220V 驱动电压），阀门动作响应时间≤200ms，且具备阀门卡滞自检测功能，当阀门未按指令完成动作时，立即触发报警并切断相关工艺单元电源。
- 系统协同与诊断功能：配备 DeviceNet 与 RS-485 双通信接口，可无缝接入 AMAT 设备主控制系统及真空系统监控平台，实现真空参数实时上传与远程控制；内置 LED 状态指示灯与故障代码输出功能，可精准定位真空规故障、阀门驱动电路异常等 8 类常见问题，缩短维护时间至 30 分钟以内。
- 工业级环境适配性：采用 FR-4 环氧玻璃布基板与镀金引脚设计，工作温度范围覆盖 - 5~75℃，湿度耐受≤80% RH（无凝露），电磁兼容性符合 IEC 61000-4 标准，可抵御等离子体设备产生的强电磁干扰，MTBF（平均无故障时间）≥60000 小时，适配 Class 100 洁净车间环境。
AMAT Applied Materials 0100-90708真空控制联锁 PCB 卡 英文资料：
1、 Core positioning and system of the product
0100-90708 Vacuum Control Interlock PCB Card is a key control and safety protection component in the semiconductor equipment vacuum system of Applied Materials Company (AMAT), belonging to the "Vacuum System Intelligent Interlock Control" product line. In core processes such as wafer etching and thin film deposition that rely on high vacuum environments, the stability of vacuum degree and the reliability of cavity sealing directly determine the success or failure of the process and equipment safety. This PCB card serves as the "vacuum safety center" and is specifically adapted to the vacuum circuit of AMAT Centura and Endura series equipment. By integrating signals from vacuum gauges, valves, and other components, real-time monitoring and interlocking response are achieved. It is the core technical unit that ensures the safety and controllability of the entire process of vacuum system from rough and fine pumping to process maintenance.
2、 Analysis of core functions and technical characteristics
Based on the stringent requirements of semiconductor vacuum systems and industry standards for interlocking control, the core characteristics of this PCB card can be accurately disassembled into the following points:
Multi source vacuum signal integrated control: equipped with 12 high-precision analog/digital input channels, it can synchronously collect pressure signals of Pirani vacuum gauge (coarse vacuum monitoring) and capacitance film vacuum gauge (high vacuum monitoring) (measurement range covers 10 ⁵~10 ⁻⁷ Pa), as well as switch status signals of isolation valves and pendulum valves. The signal sampling frequency is ≥ 1kHz, the response delay is ≤ 5ms, and millisecond level perception of vacuum parameters is achieved.
Intelligent interlocking logic execution: Built in programmable controller based on SIL 2 safety level, pre-set vacuum system exclusive interlocking logic - when the vacuum degree in the process chamber does not reach 10 ⁻ Pa (process start-up threshold), it automatically locks the RF power supply and gas inlet valve; If there is a sudden leakage in the chamber (pressure surge ≥ 10Pa/s), triple protection can be triggered within 100ms: turn off the power supply of the molecular pump, open the front-end isolation valve, and start the nitrogen gas circuit to prevent air from entering the contaminated chamber.
Precise driving of vacuum valves: Integrated with 8 high-power relay output modules, it can directly drive various types of vacuum valves such as gate valves, angle valves, clock valves, etc. (supporting DC 24V/AC 220V driving voltage). The valve action response time is ≤ 200ms, and it has a valve jamming self detection function. When the valve does not complete the action according to the instructions, it will immediately trigger an alarm and cut off the power supply of the relevant process unit.
System collaboration and diagnostic function: equipped with dual communication interfaces of DeviceNet and RS-485, it can seamlessly connect to the AMAT equipment main control system and vacuum system monitoring platform, realizing real-time uploading and remote control of vacuum parameters; Built in LED status indicator and fault code output function can accurately locate 8 common problems such as vacuum gauge faults and valve drive circuit abnormalities, reducing maintenance time to less than 30 minutes.
AMAT Applied Materials 0100-90708真空控制联锁 PCB 卡产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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