AMAT Applied Materials 0020-40923旋转锁

1.产 品 资 料 介 绍：

AMAT Applied Materials 0020-40923旋转锁 英文资料：

1、 Product core positioning

AMAT 0020-40923 is a high-precision mechanical rotary lock specially designed by Applied Materials for semiconductor equipment sealing and safety control. It belongs to the "safety opening and closing hub" for connecting equipment chambers and modules. Its core function is to achieve rapid locking and sealing of process chambers, vacuum valves, or transfer modules through a rotating mechanical structure. While ensuring the vacuum environment or process medium isolation inside the chamber, it provides mechanical interlocking protection to prevent equipment damage or process interruption caused by unauthorized operations. It is a key mechanical component in semiconductor automation equipment that balances sealing and safety.

Compared with general industrial locks, this model adopts semiconductor grade wear-resistant materials and precision meshing design, which can withstand frequent opening and closing operations in clean workshops, adapt to high pressure differentials and corrosive environments in etching, deposition and other process scenarios, and meet the high reliability requirements of 24/7 continuous production.

2、 Key technical parameters (derived from industry standards and similar products)

Based on the technical specifications of AMAT mechanical components, general requirements for semiconductor equipment locks, and core characteristics of rotary locks, the core specifications of this model are speculated as follows:

Parameter category

Specification Description

Mechanical structural characteristics

Made of stainless steel 316L lock body material, with a rotation angle of 90 ° ± 5 ° and a lock core tooth engagement accuracy of ≤ 0.02mm; supports manual/electric dual-mode operation

Sealing and load-bearing performance

Static sealing pressure ≥ 10 ⁻⁵ Torr (suitable for vacuum environment), dynamic insertion and removal life ≥ 100000 times; Maximum tensile strength of 500N

Control and interlocking functions

Integrated position sensor (outputting NPN signal), supporting equipment PLC interlocking control; Unlock response time ≤ 0.5s

Physical and Environmental Specifications

Lock body size is approximately 85 × 60 × 45mm, weight<400g; working temperature -20-80 ℃, chemical corrosion resistance level ISO 10289

Protection and Certification

Surface passivation treatment, protection level IP65; Compliant with SEMI S2/S8 semiconductor equipment safety standards and RoHS environmental certification

3、 Application scenarios and adaptation systems

1. Core application areas

As the "safety sealing valve" of the equipment, this rotary lock mainly serves the control of chambers and modules in semiconductor manufacturing:

Process chamber sealing locking: used for locking the reaction chamber door of etching machines and PECVD equipment, ensuring the vacuum sealing of the chamber by rotating the toothed structure to prevent process gas leakage or external impurities from entering

Vacuum module connection control: Adapt to the connection ports between the wafer transfer chamber and the process chamber to achieve mechanical locking after module docking, and form a dual sealing protection with the sealing ring

Safety interlock protection: Installed at key positions such as equipment maintenance doors and high-voltage module compartments, the power supply of the equipment is cut off through position signal interlocking to avoid safety accidents caused by misoperation

 AMAT Applied Materials 0020-40923旋转锁 产品展示      

 产品视频

3.其他产品

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B&R 8MSA5X.RO-X400-1 伺服电机

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FEM100 P0973CA Extension module
MPL-B540K-SJ24AA/A motor
PFTL101A 1.0KN 3BSE004166R1 Tension sensor

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218