AMAT Applied Materials 0225-01622控制器
1.产 品 资 料 介 绍：
- 等离子体刻蚀设备控制：整合射频匹配组件（如 0041-78374）、真空阀门、反应腔温控模块的运行数据，实时调节射频功率、腔室压力、温度等核心工艺参数，保障刻蚀图形精度与均匀性。
- 薄膜沉积设备控制：针对 PECVD、ALD 沉积工艺，协调气体流量控制器（MFC）、加热单元、沉积电源的工作状态，按预设工艺曲线精准控制薄膜生长速率与厚度，确保膜层质量一致性。
- 晶圆传送系统控制：对接晶圆传送机器人、FOUP 接口、对准器等传动机构，通过精准的位置算法与时序控制，实现晶圆在不同工艺腔室间的高效、无损伤转运，保障自动化生产流程连贯。
- 主机设备适配：广泛应用于 AMAT Centura 刻蚀平台、Endura 沉积系统、Producer 薄膜沉积设备及 OptiPro 晶圆测量设备。
- 配套模块兼容：与 AMAT 0100-00046 电流感应组件、0100-20001 电子接口模块、0020-40923 旋转锁等组件直接对接，形成 “感知 - 控制 - 执行” 的闭环系统。
- 协同系统联动：支持与工厂 MES 系统、设备健康管理系统（PHM）数据交互，实时上传设备运行数据、工艺日志，接收生产任务调度指令，实现设备的智能化管理与远程监控。
- 安装前准备：确认安装区域洁净度符合 Class 100 标准，清除粉尘与金属碎屑；检查控制器外观无损伤，接口无氧化；准备专用屏蔽线缆（电源线、信号线分开敷设）、扭矩扳手（精度 ±5%）及防静电工具。
- 硬件安装：将控制器固定在设备电控柜内（预留≥10cm 散热空间），连接冗余供电线路（确保正负极无反接）；按接口定义连接各子系统信号线，以太网采用屏蔽双绞线（传输距离≤100m），RS-485 总线需在两端接 120Ω 终端电阻；完成接线后用绝缘胶带固定线缆，避免线缆松动导致接触不良。
- 软件配置与调试：通过调试软件（AMAT 专用配置工具）登录控制器，配置网络参数（IP 地址、子网掩码）、协议参数（Modbus 从站地址、Profinet 设备名称）；导入预设工艺控制程序，进行单模块测试（如单独控制射频电源启停、真空阀门开关）与多模块联动测试（如模拟完整工艺流程：晶圆上载 - 腔室抽真空 - 工艺执行 - 晶圆卸载）；调试完成后备份配置参数与控制程序，防止数据丢失。
AMAT Applied Materials 0225-01622控制器 英文资料：
1、 Product core positioning
AMAT 0100-00046 current sensing component is a closed-loop current detection unit developed by Applied Materials for high-precision current monitoring of semiconductor equipment. It belongs to the "current signal sensing center" of the equipment's electronic control system. Its core function is to real-time and accurately collect current signals from key subsystems of semiconductor equipment, such as RF power supply, motor drive, and heating module. Through signal amplification, filtering, and isolation processing, the analog current signal is converted into a standard signal recognizable by the equipment control system (such as 4-20mA or 0-5V). At the same time, it has overcurrent warning and fault diagnosis functions, and is a key sensing component to ensure the safe operation of equipment and stable process parameters.
Compared to general industrial current sensors, this component adopts a semiconductor grade high-precision detection chip and electromagnetic isolation design, which can withstand high-frequency electromagnetic interference and temperature fluctuations in process scenarios such as etching and deposition. It is suitable for Class 100 cleanliness requirements in clean workshops and has low power consumption and high response speed characteristics, meeting the stringent requirements of advanced process equipment with "zero delay and high precision" for current monitoring at 14nm and below.
2、 Core structure and technical parameters (derived based on industry standards and similar products)
Based on the technical specifications of AMAT electronic control system, current monitoring requirements for semiconductor equipment, and application scenarios of this component, the core specifications are speculated as follows:
Parameter category
Specification Description
Detecting core characteristics
The detection type is AC/DC dual-mode, with a range of 0-50A (can be divided into 0-10A/0-20A/0-50A by jumper setting), and an accuracy level of ± 0.2% FS
Signal output and response
The standard output signal is 4-20mA analog (or 0-5V optional), with a response time of less than 10 μ s and a linearity error of less than 0.1% FS
Isolation and anti-interference
Adopting optoelectronic isolation technology, isolation voltage ≥ 2500V AC (1min); The anti electromagnetic interference level meets the EN 61000-6-2 standard, and the common mode rejection ratio is greater than 80dB
Structure and Material
Adopting modular packaging, with dimensions of approximately 80 × 60 × 25mm and a weight of less than 150g; the shell is made of flame-retardant ABS material (UL 94 V-0 grade) and has a protection level of IP40
Power Supply and Environment
Power supply voltage 24V DC ± 10%, typical power consumption<2W; operating temperature -10-60 ℃, humidity<85%, no condensation, storage temperature -40-85 ℃
Control and alarm
Integrated overcurrent alarm function, which can set the alarm threshold (0-100% range adjustable) through the device system, and the alarm output is an NPN switch signal
Certification and Compatibility
Compliant with CE, UL 61010-1 safety standards and SEMI S2/S8 semiconductor equipment specifications, compatible with AMAT 0100 series electronic interface modules
AMAT Applied Materials 0225-01622控制器 产品展示
产品视频
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| 6ES5998-0UF33 | 531X111PSHAPG1 | 820-30004-00 |
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| 6ES5998-0MA34 | 531X113PSFASG1 | 710-659465-20 |
| 6ES5998-0KP21 | 531X111PSHACG1 | 281-242600-2 |
| 6ES5998-0DD51 | 531X111PSHASG3 | 710-658041-20 |
| 6ES5998-0CM01 | 531X111PSHASG2 | 720-24609-002 |
| 6ES5997-3UR11 | 531X100CCHARM1 | F31X170TBSAAG1 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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