AMAT Applied Materials 0100-00046电流感应组件

1.产 品 资 料 介 绍：

AMAT Applied Materials 0100-00046电流感应组件 英文资料：

1、 Product core positioning

AMAT 0100-00046 current sensing component is a closed-loop current detection unit developed by Applied Materials for high-precision current monitoring of semiconductor equipment. It belongs to the "current signal sensing center" of the equipment's electronic control system. Its core function is to real-time and accurately collect current signals from key subsystems of semiconductor equipment, such as RF power supply, motor drive, and heating module. Through signal amplification, filtering, and isolation processing, the analog current signal is converted into a standard signal recognizable by the equipment control system (such as 4-20mA or 0-5V). At the same time, it has overcurrent warning and fault diagnosis functions, and is a key sensing component to ensure the safe operation of equipment and stable process parameters.

Compared to general industrial current sensors, this component adopts a semiconductor grade high-precision detection chip and electromagnetic isolation design, which can withstand high-frequency electromagnetic interference and temperature fluctuations in process scenarios such as etching and deposition. It is suitable for Class 100 cleanliness requirements in clean workshops and has low power consumption and high response speed characteristics, meeting the stringent requirements of advanced process equipment with "zero delay and high precision" for current monitoring at 14nm and below.

2、 Core structure and technical parameters (derived based on industry standards and similar products)

Based on the technical specifications of AMAT electronic control system, current monitoring requirements for semiconductor equipment, and application scenarios of this component, the core specifications are speculated as follows:

Parameter category

Specification Description

Detecting core characteristics

The detection type is AC/DC dual-mode, with a range of 0-50A (can be divided into 0-10A/0-20A/0-50A by jumper setting), and an accuracy level of ± 0.2% FS

Signal output and response

The standard output signal is 4-20mA analog (or 0-5V optional), with a response time of less than 10 μ s and a linearity error of less than 0.1% FS

Isolation and anti-interference

Adopting optoelectronic isolation technology, isolation voltage ≥ 2500V AC (1min); The anti electromagnetic interference level meets the EN 61000-6-2 standard, and the common mode rejection ratio is greater than 80dB

Structure and Material

Adopting modular packaging, with dimensions of approximately 80 × 60 × 25mm and a weight of less than 150g; the shell is made of flame-retardant ABS material (UL 94 V-0 grade) and has a protection level of IP40

Power Supply and Environment

Power supply voltage 24V DC ± 10%, typical power consumption<2W; operating temperature -10-60 ℃, humidity<85%, no condensation, storage temperature -40-85 ℃

Control and alarm

Integrated overcurrent alarm function, which can set the alarm threshold (0-100% range adjustable) through the device system, and the alarm output is an NPN switch signal

Certification and Compatibility

Compliant with CE, UL 61010-1 safety standards and SEMI S2/S8 semiconductor equipment specifications, compatible with AMAT 0100 series electronic interface modules

 AMAT Applied Materials 0100-00046电流感应组件 产品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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