AMAT Applied Materials 0040-07198安装电机

1.产 品 资 料 介 绍：

AMAT Applied Materials 0040-07198安装电机 英文资料：

1. Micron-level precise positioning and dynamic response capability

As a core power execution component of semiconductor equipment, the core advantage of the 0040-07198 installed motor lies in its ultra-high-precision motion control performance. Referring to the requirements of semiconductor wafer handling and process drive, this motor is highly likely to adopt an integrated design of servo control and high-precision transmission, integrating planetary roller lead screws and incremental encoders. The repeat positioning accuracy can reach ±0.003mm, meeting the precision scenarios such as 12-inch wafer transfer and photolithography mask station drive. Equipped with a low-inertia rotor structure and a high-speed response driver, the no-load acceleration time is ≤0.1s, and it can achieve stepless speed regulation from 0 to 3000rpm. Combined with a 16-bit resolution position feedback module, it can precisely execute the micron-level displacement instructions issued by the FabWorks system, ensuring the synchronization of component movement in processes such as thin film deposition and etching.

Second, special adaptation design for harsh environments

In response to the complex working conditions of semiconductor cleanrooms and equipment clusters, the stability design of motors highlights the characteristics of anti-interference and clean compatibility. The shell is made of 316L stainless steel that complies with SEMI F57 standards. After passivation treatment, the precipitation of metal ions is less than 0.1ppm, suitable for cleanroom environments above grade 10, and has passed IP67-level protection certification at the same time. It can withstand a wide operating temperature range from -30 ℃ to 80℃ and a high humidity environment of 95% RH. The interior adopts a fully sealed packaging structure. The bearings and windings are all made of chemically resistant materials, which can resist the trace erosion of process chemicals such as HF and H2SO4. Combined with a brushless design, it eliminates the particle contamination caused by carbon brush wear, meeting the strict requirements of clean processes such as photolithography and ion implantation. In addition, the motor is integrated with an electromagnetic shielding cover, achieving an electromagnetic interference suppression capability of over 100dB and avoiding signal coupling with the RF power supply of the etching machine.

Iii. Full system compatibility and rapid integration capability

To be compatible with the full range of AMAT semiconductor equipment, this installation motor features a modular seamless connection characteristic. At the hardware level, it supports EtherCAT real-time Ethernet communication with a communication cycle as low as 250μs. It can be directly connected to the main control unit of Reflexion CMP devices and Centris etching systems to achieve real-time interaction and closed-loop regulation of position and speed parameters. The motor flange and output shaft dimensions are designed in a standardized manner, compatible with the AMAT universal installation interface, and support dual installation methods of flange type and shaft extension type. Through the matching elastic coupling, mechanical connection with the ball screw and synchronous pulley can be completed within 5 minutes, without the need for secondary processing of the equipment base. In addition, the motor is equipped with over 100 sets of motion parameter configuration files, which can be quickly called up through the upper computer to adapt to different load scenarios such as wafer handling robotic arms and valve drives.

AMAT Applied Materials  0040-07198安装电机 产品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218