AMAT Applied Materials  DP-200-5F控制器模块

1.产 品 资 料 介 绍：

AMAT Applied Materials  DP-200-5F控制器模块  英文资料：

1、 High precision closed-loop control capability

As a specialized controller module in the semiconductor manufacturing field, the core advantage of DP-200-5F lies in its nanoscale parameter control accuracy. The enhanced PID control algorithm it is equipped with (possibly integrating adaptive fuzzy control logic) can achieve a control deviation of ± 0.1% FS for key process parameters such as temperature, pressure, and flow rate, especially suitable for process links such as thin film deposition and etching that are sensitive to environmental fluctuations. Referring to the technical characteristics of similar semiconductor controllers, this module is likely to support multi-channel synchronous control (estimated to reach 8-16 channels) and has parameter self-tuning function, which can dynamically optimize the control curve according to load changes.

2、 Strong adaptability to industrial environments

In response to the harsh working conditions of semiconductor factories, DP-200-5F fully considers anti-interference and environmental tolerance in hardware design. At the hardware level, isolated signal processing units may be used to achieve a common mode rejection ratio (CMRR) of over 120dB, effectively resisting electromagnetic interference (EMI) generated by device clusters. The working environment is expected to cover a wide temperature range of -40 ℃ to 70 ℃, with IP65 protection capability, and can cope with humidity fluctuations and trace chemical corrosion scenarios in clean rooms. The module size is likely to adopt a compact design, which meets the high-density integration requirements of semiconductor devices and supports quick installation in rail or panel style.

3、 Flexible communication and expansion capabilities

To achieve seamless linkage with wafer manufacturing equipment, the controller module is expected to be equipped with rich industrial communication interfaces. The standard interfaces may include real-time Ethernet buses such as EtherCAT and Profinet (communication cycle ≤ 1ms), as well as RS485 (supporting Modbus RTU protocol) for connecting auxiliary sensing devices. In terms of expansion capability, it is speculated that it supports the expansion of IO modules or dedicated function cards through the backplane bus, with a maximum capacity of thousands of IO points. It is also compatible with AMAT's self-developed FabWorks production execution system, enabling real-time uploading and remote control of process parameters.

4、 Full link security and diagnostic mechanism

The extremely high requirement for equipment safety in semiconductor manufacturing drives the construction of a multi-level security protection system for DP-200-5F. At the hardware level, independent overcurrent and overvoltage protection circuits and residual current circuit breakers are integrated, which can trigger emergency shutdown within 10 μ s when abnormalities are detected. At the software level, it has comprehensive self diagnostic functions, which can monitor more than 20 abnormal states such as temperature sensor disconnection and actuator failure in real time, and provide synchronous warnings through sound and light alarms and dry contact outputs. In addition, the module may support safety certification (such as SIL 2 functional safety certification) and comply with SEMI S2/S8 equipment safety standards.

AMAT Applied Materials  DP-200-5F控制器模块 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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