AMAT Applied Materials 0100-76088中心查找器模块

1.产 品 资 料 介 绍：

AMAT Applied Materials 0100-76088中心查找器模块 英文资料：

1. Nanoscale wafer positioning and Angle calibration capability

As a core alignment component for semiconductor wafer transmission, the core advantage of the 0100-76088 center finder module lies in its sub-micron positioning accuracy. Referring to the wafer alignment requirements of the EFEM system, this module adopts optical-mechanical fusion positioning technology: At the optical level, it integrates a 12-megapixel CMOS industrial camera and a high-power LED ring light source. Through the Canny edge detection algorithm and Hough transform technology, it can accurately identify the edge profile and Notch features of 8-12-inch wafers, with a center coordinate calculation accuracy of ±2μm. The mechanical aspect is equipped with a precision rotating Chuck and an X/ Y-axis micro-motion platform, combined with a 0.1μm resolution grating scale feedback, achieving precise calibration of a rotation Angle of ±0.05°. This ensures that the overlap error between the wafer center and the robotic arm's grasping center is ≤5μm, meeting the strict requirements for wafer positioning in nanoscale processes such as photolithography and etching.

2. Hardware protection design adapted to harsh environments

In response to the complex working conditions of semiconductor cleanrooms and equipment clusters, the module highlights anti-interference and clean compatibility features in its hardware design. The shell is made of 316L stainless steel that complies with the SEMI F57 standard. After passivation treatment, the precipitation of metal ions is less than 0.05ppm, suitable for a Class 10 cleanroom environment. At the same time, it has passed the IP67-level protection certification and can withstand a wide temperature working range from -30 ℃ to 80℃ and a high humidity environment of 95%RH. The optical system adopts a sealed lens assembly. The surface of the lens is coated with an anti-reflection film and an anti-fouling coating to prevent the residue of photoresist and particle contamination from affecting the imaging accuracy. The circuit section adopts a fully metal shielding cover and a four-layer PCB isolation design, with an electromagnetic interference suppression capability of over 110dB, which can resist the strong electromagnetic radiation generated by the RF power supply of the etching machine and ensure the stable transmission of sensor data.

Iii. Seamless compatibility and interconnection capabilities across the entire system

To be compatible with the full range of AMAT semiconductor devices, this central finder module features cross-platform integration. It is equipped with an EtherCAT real-time Ethernet interface at the hardware level, with a communication cycle as low as 250μs. It can be directly connected to the FabWorks production execution system to achieve real-time data interaction with the main control unit of the Reflexion CMP equipment and the 0100-20003 digital I/O board. Synchronize the wafer positioning parameters to the robotic arm control system. The interface design is compatible with the AMAT universal EFEM device protocol. Through standardized pin definitions (2.54mm pitch), it can be connected to the wafer transfer unit of the Centris etching system without adapter modules. Meanwhile, it supports the SEMI E134 communication protocol and can achieve data intercommunication with third-party devices. In addition, the module is equipped with over 200 sets of wafer specification configuration files, which can quickly adapt to the positioning requirements of wafers of different sizes and thicknesses, and shorten the equipment debugging cycle by more than 40%.

AMAT Applied Materials  0100-76088中心查找器模块 产品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218