AMAT Applied Materials 9090-01251控制器模块

1.产 品 资 料 介 绍：

AMAT Applied Materials 9090-01251控制器模块 英文资料：

1、 Core Control Performance Characteristics

Multi dimensional high-precision control capability

As the core control unit of semiconductor equipment, it is speculated that integrating 8-16 digital input/output channels and 4-8 analog input/output channels can achieve precise control of multiple links such as motor drive, valve switch, sensor data acquisition, etc. Adopting 32-bit industrial grade microprocessors (such as ARM Cortex-A series) with a clock frequency of over 1GHz, coupled with floating-point arithmetic units, it can quickly process complex control algorithms with a control accuracy of ± 0.1% FS, which can meet the control requirements at the micrometer or even nanometer level in processes such as wafer etching and thin film deposition, such as accurately adjusting the process chamber pressure to ± 0.001Torr.

Real time response and dynamic adjustment function

Equipped with a real-time operating system (RTOS), the task scheduling cycle is as short as 1ms. It can receive and process massive data from device sensors in real time (such as temperature, flow, and position signals), and output control instructions within 50 μ s, effectively avoiding process deviations caused by control delays. Built in dynamic adjustment algorithm, which can automatically adjust control parameters when equipment load or process parameters fluctuate (such as changes in wafer transfer robotic arm load), maintain stable equipment operation, and ensure process consistency.

Complex process logic programming support

Supports various industrial programming methods such as ladder diagram (LD), functional block diagram (FBD), structured text (ST), etc., compatible with the International Electrotechnical Commission (IEC) 61131-3 standard, making it convenient for engineers to write customized control programs according to different semiconductor process requirements. At the same time, it has the function of online program modification and debugging, which can complete program updates without stopping the machine, greatly shorten the process optimization cycle, and adapt to the production mode of multiple varieties and small batches of semiconductor equipment.

2、 System collaboration and data interaction characteristics

Diversified communication and integration capabilities

Equipped with rich industrial communication interfaces, including 2 Gigabit Ethernet (supporting Profinet and EtherNet/IP protocols), 2 RS485 (supporting Modbus RTU protocol), and 1 CANopen bus interface, it can seamlessly interface with AMAT 0190-24007 single board computer, 20-000314-003 analog input module, and factory MES system. Support bidirectional real-time data transmission, which can upload equipment operating parameters (such as process temperature and pressure curves) to the management system, as well as receive process formulas and control instructions issued by upper level systems, achieving deep collaboration between equipment control and production management.

AMAT Applied Materials 9090-01251控制器模块 产品展示      

 产品视频

3.其他产品

PPD512A10-454000驱动控制单元
NI PXIE-5663E多功能 I/O 模块
AMAT 0010-27431控制器组件

4.其他英文产品

SCYC51020 58052582H pulse output card
SCYC51040 58052680E Interface component module
SCYC51090 58053899E Interface component

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218