AMAT Applied Materials 0010-81309温度控制单元组件
1.产 品 资 料 介 绍：
- 控温范围覆盖 - 50~300℃（适配半导体工艺腔室、加热平台需求），采用 PID 闭环控制，控温精度 ±0.1℃，支持快速升温（升温速率≥5℃/min），避免温度波动影响工艺稳定性。
- 集成多路温度采集通道（推测 4-8 路），兼容热电偶（K/J 型）、RTD 传感器，可实时监测多区域温度，异常时自动调节输出功率，保障全域温度均匀性。
- 输出接口可直接对接 AMAT 0190-35176 加热器驱动，支持 4-20mA 模拟信号 / RS485 通信，能接收 0120-00794 过程传感器主板的温度数据，形成 “采集 - 控制 - 执行” 闭环。
- 兼容 AMAT 0190-24007 单板计算机，支持 Modbus 协议，可远程设置温度阈值、启停时间，适配 ENDURA® 等半导体装备的自动化温控链路。
- 集成超温保护（超设定值 10℃触发断电）、传感器断线告警、过流保护（超额定电流 150% 切断），故障时立即锁定输出并发送告警信号至主控系统。
- 采用电气隔离设计（隔离电压≥2500V DC），抗电磁干扰符合 EN 55022 Class B 标准，适配半导体车间复杂电磁环境，避免信号干扰导致控温偏差。
- 核心元件（温控芯片、继电器）为工业级型号，经高低温老化（-40~+85℃）与 10 万次循环控温测试，MTBF≥8 万小时，支持 7×24 小时连续运行。
- 符合 UL/CE/RoHS 认证及 SEMI 行业标准，原厂提供 1-3 年质保，备件可快速替换，减少因温控故障导致的设备停机时间。
AMAT Applied Materials 0010-81309温度控制单元组件 英文资料：
1. Temperature control performance (AMAT 0010-81309)
The temperature control range covers -50~300 ℃ (suitable for semiconductor process chambers and heating platforms), using PID closed-loop control with a temperature control accuracy of ± 0.1 ℃. It supports rapid heating (heating rate ≥ 5 ℃/min) to avoid temperature fluctuations affecting process stability.
Integrated multiple temperature acquisition channels (estimated to be 4-8 channels), compatible with thermocouples (K/J type) and RTD sensors, can monitor temperature in multiple areas in real time, automatically adjust output power in case of abnormalities, and ensure temperature uniformity throughout the entire area.
2. Adaptation and linkage (AMAT 0010-81309)
The output interface can directly interface with the AMAT 0190-35176 heater driver, support 4-20mA analog signal/RS485 communication, and can receive temperature data from the 0120-00794 process sensor motherboard, forming a "acquisition control execution" closed loop.
Compatible with AMAT 0190-24007 single board computer, supports Modbus protocol, can remotely set temperature threshold and start stop time, compatible with ENDURA ® Automated temperature control link for semiconductor equipment.
3. Safety and Protection (AMAT 0010-81309)
Integrated over temperature protection (triggering power-off when exceeding the set value by 10 ℃), sensor disconnection alarm, overcurrent protection (cutting off when exceeding the rated current by 150%), immediately lock the output and send an alarm signal to the main control system in case of a fault.
Adopting electrical isolation design (isolation voltage ≥ 2500V DC), anti electromagnetic interference meets EN 55022 Class B standard, adapts to complex electromagnetic environment in semiconductor workshop, and avoids temperature control deviation caused by signal interference.
4. Reliability (AMAT 0010-81309)
The core components (temperature control chip, relay) are industrial grade models that have undergone high and low temperature aging (-40~+85 ℃) and 100000 cycles of temperature control testing. The MTBF is ≥ 80000 hours and supports continuous operation for 7 × 24 hours.
Compliant with UL/CE/RoHS certification and SEMI industry standards, the original factory provides a 1-3 year warranty, and spare parts can be quickly replaced to reduce equipment downtime caused by temperature control failures.
AMAT Applied Materials 0010-81309温度控制单元组件 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
