AMAT Applied Materials 3870-02612阀门组件

1.产 品 资 料 介 绍：

AMAT Applied Materials 3870-02612阀门组件 英文资料：

1. Control and Sealing Performance (AMAT 3870-02612)

Adopting an electromagnetic pilot drive structure, it can accurately control the on/off of media such as gases (such as nitrogen and argon) and liquids (such as process drugs), with a response time of ≤ 10ms. It can quickly match the instantaneous switching requirements of fluids in semiconductor etching and deposition processes, avoiding the impact of media retention on process accuracy

Diaphragm type sealing design, providing two materials to choose from: NBR (oil and solvent resistant) and EPDM (acid and alkali resistant), suitable for different process medium characteristics; The leakage rate is strictly controlled at ≤ 0.1ml/min, in compliance with the ISO 5208 Class 6 sealing standard, to prevent harmful media leakage from contaminating the clean workshop

2. Adaptation and linkage (AMAT 3870-02612)

The nominal pressure covers 0.03~1.6MPa, and the diameter is available in four specifications: 15mm (1/2 inch), 20mm (3/4 inch), 25mm (1 inch), and 50mm (2 inches). It can seamlessly connect to equipment circuits with different diameters such as reaction chamber gas pipelines and liquid delivery systems

Comes with 2 signal feedback interfaces (NPN/PNP type optional), which can be directly connected to the I/O port of AMAT 0100-09008 pneumatic control board to transmit real-time valve "on/off" status signals, facilitating the monitoring of pipeline continuity by the main control system and avoiding misoperation

3. Structure and Environment (AMAT 3870-02612)

The valve body is made of brass (corrosion-resistant coating treatment) or 316L stainless steel material. The former is suitable for ordinary fluids, while the latter is resistant to strong acids and alkalis, meeting the requirements of high-purity semiconductor processes; The connection method supports internal threads (G thread/NPT thread) or flanges (PN16 grade), with flexible installation and adaptability to equipment dense pipeline layouts

Working temperature range -5~80 ℃, able to cope with fluctuations in temperature and humidity in clean workshops day and night; Protection level IP54, able to block dust intrusion and splashing water, and has the ability to resist vibration of 10-500Hz and 50G impact, adapting to the mechanical vibration environment during equipment operation

4. Reliability (AMAT 3870-02612)

The core components (electromagnetic coil, sealing membrane) have undergone 10 million cycles of on-off testing and have no performance degradation; Mean Time Between Failures (MTBF) ≥ 100000 hours, capable of supporting 7 × 24-hour continuous production mode in semiconductor factories, reducing downtime maintenance frequency

Complies with API 598 valve pressure testing standards, ASME B16.34 valve size standards, and has passed UL electrical safety certification and CE electromagnetic compatibility certification; The original factory provides a 1-3 year warranty, with sufficient spare parts inventory. Upon receiving a replacement request, it can be shipped within 48 hours, reducing equipment downtime

AMAT Applied Materials 3870-02612阀门组件 产品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218