AMAT DIP-510-005互锁模块

1.产 品 资 料 介 绍：

AMAT DIP-510-005 互锁模块

产品应用领域

1. 半导体制造设备

   • 用于集成电路（IC）生产过程中，对光刻机、刻蚀机、CVD、PVD 等关键工艺设备的安全互锁。

   • 确保设备在气路、真空、温度、压力等异常状态下实现紧急保护和互锁停机。

2. 工厂自动化与安全联锁

   • 适用于晶圆厂的中央控制系统，通过互锁模块实现设备与设备之间的安全联动。

   • 防止设备超规格运行，保障生产连续性与人员安全。

3. 真空与气体控制系统

   • 在高纯气体输送、真空腔室控制等系统中，起到信号监控与安全隔离作用。

   • 保证气体供应、抽真空等环节在联锁逻辑下安全执行。

4. 电源与工艺保护

   • 作为设备电源控制和工艺执行的安全屏障，防止在异常条件下继续供电或执行危险工艺。

   • 广泛用于设备的开/关机顺序控制与紧急切断。

5. 高可靠性实验与检测平台

   • 应用于半导体工艺实验平台或研发装置，提供安全联锁与测试保护，避免误操作带来损失。

AMAT DIP-510-005互锁模块英文资料：

AMAT DIP-510-005 Interlock Module

Product application areas

Semiconductor Manufacturing Equipment

Used for the safety interlock of key process equipment such as lithography machines, etching machines, CVD, PVD, etc. in the production process of integrated circuits (ICs).

Ensure that the equipment achieves emergency protection and interlock shutdown in case of abnormal conditions such as gas path, vacuum, temperature, pressure, etc.

Factory automation and safety interlocking

A central control system suitable for wafer fabs, which achieves secure linkage between devices through interlocking modules.

Prevent equipment from operating beyond specifications, ensure production continuity and personnel safety.

Vacuum and gas control system

In systems such as high-purity gas transportation and vacuum chamber control, it plays a role in signal monitoring and safety isolation.

Ensure safe execution of gas supply, vacuum pumping and other processes under interlocking logic.

Power supply and process protection

As a safety barrier for equipment power control and process execution, it prevents the continuation of power supply or the execution of hazardous processes under abnormal conditions.

Widely used for on/off sequence control and emergency shutdown of equipment.

High reliability experimental and testing platform

Applied to semiconductor process experimental platforms or R&D devices, providing safety interlock and testing protection to avoid losses caused by misoperation.

AMAT DIP-510-005互锁模块 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218