AMAT Applied Materials E19321290交流电源模块

1.产 品 资 料 介 绍：

产品概述

AMAT E19321290 交流电源模块是 Applied Materials 半导体设备中的核心电力模块，用于为设备各子系统和控制模块提供稳定可靠的交流电源。该模块能够将外部电网电压转换为设备所需的标准电压和频率，确保加热器、驱动器、控制器、传感器及其他工艺模块的正常运行，是设备安全、稳定、高效运行的基础保障。

技术参数（典型特征）

• 类型：交流电源模块 / AC Power Module

• 功能：提供稳定交流电源，支持设备子系统运行

• 输入电压：标准工业电网电压（具体取决设备型号）

• 输出电压/功率：根据设备需求设计，支持各类模块供电

• 保护功能：过压保护、过流保护、短路保护

• 接口类型：电气接口，与设备控制系统及负载模块连接

• 工作环境：洁净室兼容，耐高温、抗振动

• 兼容设备：Applied Materials 各类沉积（CVD/PVD）、刻蚀（Etch）、离子注入及热处理设备

应用场景

1. 核心电力供应

   • 为设备的控制系统、执行器、传感器及工艺模块提供稳定电源。

2. 电源保护

   • 防止电压波动、过流和短路对设备的损害，确保安全运行。

3. 工艺稳定性保障

   • 稳定电源输出，保证加热器、驱动器及控制模块的正常运行，提高工艺重复性。

4. 设备维护与升级

   • 模块化设计便于安装、替换和维护，提高设备可用性。

AMAT Applied Materials  E19321290交流电源模块 英文资料：

Product Overview

The AMAT E19321290 AC power module is the core power module in Applied Materials semiconductor equipment, used to provide stable and reliable AC power to various subsystems and control modules of the equipment. This module is capable of converting external grid voltage into the standard voltage and frequency required by the equipment, ensuring the normal operation of heaters, drivers, controllers, sensors, and other process modules. It is the fundamental guarantee for the safe, stable, and efficient operation of the equipment.

Technical parameters (typical features)

Type: AC Power Module

Function: Provide stable AC power supply and support the operation of device subsystems

Input voltage: Standard industrial grid voltage (depending on equipment model)

Output voltage/power: Designed according to equipment requirements, supporting power supply for various modules

Protection functions: overvoltage protection, overcurrent protection, short circuit protection

Interface type: Electrical interface, connected to equipment control system and load module

Work environment: cleanroom compatible, high temperature resistant, vibration resistant

Compatible devices: Applied Materials various deposition (CVD/PVD), etching (Etch), ion implantation, and heat treatment equipment

Application scenarios

Core power supply

Provide stable power supply for the control system, actuators, sensors, and process modules of the equipment.

power protection

Prevent damage to equipment caused by voltage fluctuations, overcurrent, and short circuits to ensure safe operation.

Process stability guarantee

Stable power output ensures the normal operation of heaters, drivers, and control modules, and improves process repeatability.

Equipment maintenance and upgrade

Modular design facilitates installation, replacement, and maintenance, improving equipment availability.

AMAT Applied Materials  E19321290交流电源模块 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218