AMAT Applied Materials 0100-90855旋转/扫描联锁板

1.产 品 资 料 介 绍：

产品概述

AMAT 0100-90855 旋转/扫描联锁板是 Applied Materials 半导体设备中的安全和控制模块，用于管理设备中旋转部件或扫描系统的动作联锁。该模块通过监控旋转或扫描装置的状态，确保在设备操作或工艺运行过程中实现安全互锁，防止设备损坏或工艺异常。它是半导体设备自动化运行和操作安全的重要组成部分。

技术参数（典型特征）

• 类型：旋转/扫描联锁板 / Rotation/Scan Interlock Board

• 功能：监控旋转或扫描系统状态，提供安全联锁信号

• 输入信号：旋转或扫描装置位置、速度或状态反馈

• 输出信号：联锁控制信号，传递至控制器或安全系统

• 接口类型：数字输入/输出接口，与主控制器或操作面板连接

• 工作环境：洁净室兼容，耐高温、抗振动

• 兼容设备：Applied Materials 各类沉积（CVD/PVD）、刻蚀（Etch）、离子注入及扫描相关工艺设备

应用场景

1. 旋转部件联锁

   • 监控晶圆或工艺板旋转装置，确保旋转安全运行，防止异常动作。

2. 扫描系统安全控制

   • 对扫描机构的状态进行监控，实现操作安全互锁。

3. 工艺保护

   • 在旋转或扫描设备异常时自动触发联锁信号，防止工艺或设备损坏。

4. 设备维护与替换

   • 模块化设计便于拆装和更换，减少停机时间。

AMAT Applied Materials  0100-90855旋转/扫描联锁板 英文资料：

Product Overview

AMAT 0100-90855 Rotation/Scanning Interlock Board is a safety and control module in Applied Materials semiconductor equipment, used to manage the action interlocking of rotating components or scanning systems in the equipment. This module ensures safe interlocking during equipment operation or process running by monitoring the status of rotating or scanning devices, preventing equipment damage or process abnormalities. It is an important component of the automated operation and operational safety of semiconductor equipment.

Technical parameters (typical features)

Type: Rotation/Scan Interlock Board

Function: Monitor the rotation or scanning system status and provide safety interlock signals

Input signal: feedback on the position, speed, or status of the rotating or scanning device

Output signal: Interlocking control signal, transmitted to the controller or safety system

Interface type: Digital input/output interface, connected to the main controller or operation panel

Work environment: cleanroom compatible, high temperature resistant, vibration resistant

Compatible devices: Applied Materials various deposition (CVD/PVD), etching (Etch), ion implantation, and scanning related process equipment

Application scenarios

Interlocking of rotating components

Monitor the wafer or process board rotation device to ensure safe operation and prevent abnormal movements.

Scanning system security control

Monitor the status of the scanning mechanism and achieve operational safety interlock.

Process protection

Automatically trigger interlocking signals when rotating or scanning equipment is abnormal to prevent process or equipment damage.

Equipment maintenance and replacement

Modular design facilitates disassembly and replacement, reducing downtime.

AMAT Applied Materials  0100-90855旋转/扫描联锁板 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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