AMAT Applied Materials 0100-35057气体面板

1.产 品 资 料 介 绍：

产品概述

AMAT 0100-35057 气体面板是 Applied Materials 半导体设备中用于气体管理的核心模块。它负责将工艺气体从气源分配到设备各工艺模块，并调节气体流量、压力和混合比例，确保沉积（CVD/PVD）、刻蚀（Etch）及其他工艺过程中气体供应的稳定和精确。气体面板是半导体工艺安全、稳定运行和重复性控制的重要组成部分。

技术参数（典型特征）

• 类型：气体面板 / Gas Panel

• 功能：气体分配、流量调节、压力控制、混气管理

• 接口类型：多通道气体输入/输出接口，适配各类工艺模块

• 控制方式：可配合流量控制器或控制器实现数字或模拟闭环控制

• 工作环境：洁净室兼容，耐腐蚀、耐高压

• 适用气体：工艺气体（如N₂、Ar、H₂、SiH₄等）

• 兼容设备：Applied Materials 各类沉积、刻蚀及热处理设备

应用场景

1. 工艺气体分配与控制

   • 将气源供应的气体分配至沉积、刻蚀或其他工艺模块，调节流量与压力。

2. 气体混合管理

   • 对多种气体进行精确混合，确保工艺反应条件一致。

3. 工艺安全与保护

   • 内置安全阀或联锁机制，防止气体异常或泄漏。

4. 设备维护与模块替换

   • 模块化设计便于拆装和更换，提高维护效率。

AMAT Applied Materials  0100-35057气体面板 英文资料：

Product Overview

AMAT 0100-35057 gas panel is a core module used for gas management in Applied Materials semiconductor equipment. It is responsible for distributing process gases from the gas source to various process modules of the equipment, and adjusting gas flow rate, pressure, and mixing ratio to ensure stable and accurate gas supply during deposition (CVD/PVD), etching (Etch), and other processes. Gas panel is an important component of semiconductor process safety, stable operation, and repeatability control.

Technical parameters (typical features)

Type: Gas Panel

Function: Gas distribution, flow regulation, pressure control, mixing management

Interface type: Multi channel gas input/output interface, compatible with various process modules

Control method: It can be combined with a flow controller or controller to achieve digital or analog closed-loop control

Work environment: cleanroom compatible, corrosion-resistant, high-pressure resistant

Applicable gases: process gases (such as N ₂, Ar, H ₂, SiH ₄, etc.)

Compatible devices: Various deposition, etching, and heat treatment equipment from Applied Materials

Application scenarios

Process gas distribution and control

Distribute the gas supplied by the gas source to deposition, etching, or other process modules, and adjust the flow rate and pressure.

Gas mixing management

Accurately mix multiple gases to ensure consistent process reaction conditions.

Process safety and protection

Built in safety valve or interlocking mechanism to prevent gas abnormalities or leaks.

Equipment maintenance and module replacement

Modular design facilitates disassembly and replacement, improving maintenance efficiency.

AMAT Applied Materials  0100-35057气体面板 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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